Cryo-Torr Cryopump Description
1-10
P/N 8040613
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Table 1-7: Cryo-Torr 400 Cryopump Specifications
Parameter
Specifications
Rough Pump Connection
NW 25 ISO KF
Integrated Hardware
Second Stage Diode
Pumping Speeds:
Water
Air
Hydrogen
Argon
16,000 liters/sec
6000 liters/sec
12,000 liters/sec
5000 liters/sec
Argon Throughput
500 scc/min. (6.3 torr liters/second)
Capacity:
Argon
Hydrogen
2500 std.
30 std. liters @ 5 x 10
-6
torr
Crossover
300 torr-liters
Cooldown Time
2.5 hours nominal
Dimensions
Length - 24.00 inches (328 mm)
Weight
160 lbs. (72.5 kg)
