Maintenance Procedures
5-4
P/N 8040613
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
b. Rinse the item in clean hot water.
c. Air or oven dry all items at 150°F (66°C) maximum before
reinstalling into the cryopump.
CAUTION
Do not clean the 15K cryo-adsorbing array, because you may
severely contaminate the adsorbent in the cleaning process.
4. Wearing lint-free gloves, reassemble the cryopump. Replace any
indium gasket damaged during disassembly with a gasket cut from
indium gasket material.
5. Torque all screws that compress indium gaskets for a minimum of 5
seconds to allow proper gasket seating:
Table 5-1: Indium Gasket Screw Torque Specifications
Screw Thread
Torque (Inch-Pounds)
No. 4-40
11
No. 6-32
20
