Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
P/N 8040613
2-3
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Roughing Pump Connection
Connect your Cryo-Torr Cryopump to a roughing pump system using a
roughing line with the largest inside diameter possible to minimize the
roughing time required during start-up procedures prior to normal
operation. The roughing pump should have a blank-off pressure of less
than 20 microns. The roughing pump connects to the Cryo-Torr Cryopump
roughing valve. The valve will accept an ISO NW-25 flange.
A molecular sieve roughing trap to minimize oil backstreaming from your
roughing pump system is recommended and should be installed in the
roughing pump line near the roughing pump. The trap must be properly
maintained. Connect the roughing valve to the roughing pump as follows:
1. Install the roughing pump line to the cryopump roughing valve
port using the clamp provided. Tighten the clamp securely.
Purge Gas Connection
Connect your purge gas supply line to the purge valve 1/8 NPTF fitting.
Adjust the supply pressure to achieve 1-2 cfm.
