Regeneration
3-2
P/N 8040613
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Extended loss of electrical power (10 minutes or longer), system vacuum
failure, such as venting with a partially open vacuum isolation valve, and
operator error may necessitate cryopump regeneration.
NOTE: Short term electrical outages of up to 10 minutes should not result
in the need to regenerate your cryopump.
Assisted Regeneration
A regeneration cycle incorporating the use of a heated dry inert purge gas
(nitrogen/argon) is the preferred method of regeneration and will overcome
unassisted regeneration technical difficulties by:
•
Minimizing the required time to bring the condensing and cryo-
adsorbing arrays to room temperature
•
Reducing the time required to rough the cryopump because the dry
inert purge gas will minimize the amount of residual water vapor in
the 15K array
•
Diluting hazardous gases and ensuring their removal from the
cryopump housing
NOTE: Call 1-800-FOR GUTS to obtain the accessories listed in
Table 3-1.
1. Close the Hi-Vac isolation valve.
2. Shut off the cryopump by setting the System Power switch on the
compressor to the OFF position.
3. Immediately introduce heated dry purge gas through the vacuum
vessel purge fitting at approximately 150º F (66º C) and at a flow
rate of 1 -2 cfm. Allow the purge gas to vent through the relief
valve.
4. Halt the gas purge when the condensing arrays reach 80º F (26º C)
(300K).
Table 3-1: Required Accessories for Assisted Regeneration
Part Number
Description
8080250K020
Purge Gas Heater, 110 V
8080250K023
Purge Gas Solenoid Valve, 110V
