Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
P/N 8040613
2-1
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Section 2 - Installation
Introduction
Installation information is presented for experienced and non-experienced
Cryo-Torr Cryopump system technicians. The flowchart in Figure 2-1
highlights the major tasks for installation of Cryo-Torr Cryopumps. Refer
to Figure 2-1 and the appropriate installation procedure within this section
for the type of cryopump being installed.
Figure 2-1: Block Diagram for Cryo-Torr System Installation
Installation
(Refer to Page 2-2)
Roughing Pump
Connections
(Refer to Page 2-2)
Purge Gas
Connections
(Refer to Page 2-3)
Power Cable
Connection
(Refer to Page 2-5)
Vent Pipe
Connections
(Refer to Page 2-2)
Helium Line
Connections
(Refer to Page 2-5)
Determine Crossover
Pressure
(Refer to Page 2-6)
Storage
(Refer to Page 2-10)
Shutdown Cryopump
(Refer to Page 2-9)
Start-up Cryopump
(Refer to Page 2-9)
