Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
P/N 8040613
5-3
C
HELIX TECHNOLOGY CORPORATION
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TI
CRYOGENICS
c. Perform the flushing steps a and b four more times.
d. Pressurize the cold head to a static charge pressure of 195-
205 psig (1345-1415 kPa) and run the cold head drive motor
for 10 to 30 seconds.
e. Perform steps b through d four more times for a total of 25
flushes and 5 drive-motor runs.
8. Verify that the cold head is pressurized to the static charge pressure
of 195-205 psig (1345-1415 kPa).
9.
Disconnect the maintenance manifold from the helium return and
supply lines.
10. Reconnect the helium return and supply lines to the return and sup-
ply connectors at the rear of the compressor. The cryopump is now
ready for operation.
Cleaning the Cryo-Torr Cryopump
WARNING
If the cryopump has been used to pump toxic or dangerous materials,
you must take adequate precautions to safeguard personnel.
Cleaning the arrays or other interior surfaces of the cryopump vacuum
vessel is seldom required because dust build-up does not affect
performance, and the special alloy copper cryo-condensing arrays are
nickel plated for corrosion resistance.
If you wish to clean the arrays and other interior surfaces, follow the
procedures below.
1. Confirm that an adequate supply of indium gasket material, P/N
3543738P001, is available to replace gaskets inadvertently
damaged during disassembly.
2. Carefully disassemble the components in the vacuum vessel,
including the arrays and radiation shield, to avoid damage to the
indium gaskets.
3. Clean the interior surface of the vacuum vessel, the 80K condens-
ing array, and the 80K radiation shield as follows:
a. Wash each item in strong soap or detergent solution and hot
water.
