Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
P/N 8040613
1-11
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Table 1-8: Cryo-Torr 500 Cryopump Specifications
Parameter
Specifications
Rough Pump Connection
NW 25 ISO KF
Integrated Hardware
Second Stage Diode
Pumping Speeds:
Water
Air
Hydrogen
Argon
30,000 liters/sec
10,000 liters/sec
10,000 liters/sec
8400 liters/sec
Argon Throughput
500 scc/min. (6.3 torr liters/second)
Capacity:
Argon
Hydrogen
3000 std. liters; 1,500,000 torr-liters
16 std. liters @ 5 x 10
-6
torr
Crossover
500 torr-liters
Cooldown Time
3 hours nominal
Dimensions
Length - 23.84 inches (605.54 mm)
Weight
205 lbs. (93.0 kg)
