CTI-CRYOGENICS CRYO-TORR 10, Installation, Operation And Maintenance Instructions

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Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
iv P/N 8040613
C
HELIX TECHNOLOGY CORPORATION
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TI CRYOGENICS
Table of Contents (continued)
Appendix A - Customer Support Centers
Figures
Figure 1-1: Cryo-Torr High-Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Figure 1-2: Cryo-Torr High-Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-3: Cutaway View of a Typical Cryo-Torr High-Vacuum Pump . . . . 1-13
Figure 1-4: Cryo-Torr Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Figure 1-5: Typical Cryo-Torr System with 9000 Series Compressor . . . . . . 1-15
Figure 1-6: Typical Cryo-Torr System with 8200 Compressor . . . . . . . . . . . . 1-16
Figure 2-1: Block Diagram for Cryo-Torr System Installation . . . . . . . . . . . . . 2-1
Figure 2-2: Gas and Electrical Component Location on a Typical
Cryo-Torr Cryopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Tables
Table 1-1: Cryo-Torr 4F Cropump Specifications . . . . . . . . . . . . . . . . . . . . . . 1-4
Table 1-2: Cryo-Torr 8 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-3: Cryo-Torr 8F Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . 1-6
Table 1-4: Cryo-Torr 10 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . . 1-7
Table 1-5: Cryo-Torr 100 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . 1-8
Table 1-6: Cryo-Torr 250F Cryopump Specifications . . . . . . . . . . . . . . . . . . . 1-9
Table 1-7: Cryo-Torr 400 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . 1-10
Table 1-8: Cryo-Torr 500 Cryopump Specifications . . . . . . . . . . . . . . . . . . . . 1-11
Table 2-1: Crossover Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Table 2-2: Condensable Gases Capacity (Argon, Nitrogen, Oxygen, etc.) . . . . 2-7
Table 3-1: Required Accessories for Assisted Regeneration . . . . . . . . . . . . . . . 3-2
Table 4-1: Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Table 5-1: Indium Gasket Screw Torque Specifications . . . . . . . . . . . . . . . . . . 5-4
Table A-1: Customer Support Centers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-2