Brooks On-Board 8, Installation And Maintenance Instructions Manual

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©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 ix
List of Tables
Table 1-1:On-Board 8 GLE Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . . 1-8
Table 1-2:On-Board 8F GLE Cryopump Specifications . . . . . . . . . . . . . . . . . . . . . 1-9
Table 3-1:Cryopump Troubleshooting Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Table 3-1:Troubleshooting Procedures (continued) . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Table 4-1:Methods of Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Table 4-2:Decontamination Tools and Equipment. . . . . . . . . . . . . . . . . . . . . . . . . . 4-3