Brooks On-Board 8, Installation And Maintenance Instructions Manual

Page: 16 / 56

1-6 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
On-Board Vacuum Network Controller Module Option
The On-Board Vacuum Network Controller Module provides monitor and
control capability of multiple On-Board Pumps, turbo pumps, valves and
gauges from the production facility host computer.
The On-Board Vacuum Network Controller Module is typically mounted
on either side of the On-Board 8 GLE Cryopump Module to minimize the
space required for installation.
Refer to the On-Board Vacuum Network Controller Module
Installation and Operation Instructions , Helix Technology Corporation
P/N 8040565 for more information.
Figure 1-3: On-Board 8F GLE Cryopump with Optional On-Board Vacuum Network
Controller Module
ON-BOARD
PCM
ON-BOARD 8F
GLE CRYOPUMP
VACUUM
NETWORK
CONTROLLER
MODULE