Brooks On-Board 8, Installation And Maintenance Instructions Manual

Page: 17 / 56

Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-7
Remote Operation Option
On-Board 8 GLE Cryopumps can be controlled remotely using either a
BITBUS™ or RS-232 protocol. The most common implementation, used
in multiple On-Board 8 GLE Cryopump process tools, is to network the
On-Board 8 GLE Cryopumps using the BITBUS™ protocol. In this
configuration, the networked On-Board 8 GLE Cryopumps are managed as
a group by the On-Board Vacuum Network Controller Module, which
coordinates group regeneration cycles and provides a standardized
communication link to the process tool host controller. Using this
approach, control of the networked On-Board 8 GLE Cryopumps is fully
integrated with process tool control.