Brooks On-Board 8, Installation And Maintenance Instructions Manual

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4-10 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
13. Verify that the coldhead has the correct helium static charge
pressure.
14. Disconnect the 5 foot flexlines from the decontaminated coldhead
supply and return connectors.
15. Reconnect the system helium RETURN line to the return connector
on the coldhead as shown in Figure 4-2 .
16. Reconnect the system helium SUPPLY line to the supply connector
on the coldhead as shown in Figure 4-2 .
Once Step 16 has been completed, the decontamination of the first On-
Board GLE Cryopump is completed and charged to the correct pressure
with clean helium. The remaining coldheads need to be decontaminated.
17. Repeat Steps 10 - 16 for each coldhead being decontaminated.
18. Once Step 17 has been completed, the On-Board GLE Cryopumps
are ready to be cooled down. Adjust the compressor pressure to the
correct charge pressure.
NOTE: Refer to the appropriate Compressor Installation, Operation, and
Maintenance Instructions for the correct static helium charge pressure
value and adjustment procedure.
NOTE: The charging adapter can be inserted into any helium line at the
tool to simplify the final adjustment of system pressure. It should be
removed after final pressure adjustment.
19. Restart the compressor.
20. Start a Full Regeneration cycle on all the On-Board GLE
Cryopumps to prepare the vacuum side of the On-Board GLE
Cryopump.
21. Allow the On-Board GLE Cryopumps cryopumps to cool to below
17K.
If ratcheting in the On-Board GLE Cryopump reappears, refer to
Appendix A and call your nearest CTI-CRYOGENICS Customer Support
Center for additional technical assistance.
Decontamination Alternatives
Method #1 Decontaminate All Cryopumps
The preceding procedure is the most effective method to remove gaseous
contaminants from the helium circuit. All On-Board GLE Cryopumps
were first cooled down and the contaminant frozen. Each On-Board GLE
Cryopump was decontaminated in sequence.