Brooks On-Board 8, Installation And Maintenance Instructions Manual

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1-12 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Figure 1-4: Typical On-Board 8 GLE Cryopump System
WATER
COMPRESSOR POWER
VACUUM
HELIUM RETURN
HELIUM SUPPLY
CRYOPUMP POWER
208 VAC, 50/60 Hz
208 VAC 50/50 Hz
ST
AT
US
RS-
2
3
2
9600 COMPRESSOR
RE
LA
Y
S
24V
, 1 A
RS
-2
32
RE
M
O
T
E
AU
X
TC
NE
T
W
ORK