Brooks On-Board 8, Installation And Maintenance Instructions Manual

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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 2-3
When connecting a vent pipe to your On-Board GLE Cryopump, the 1.30-
inch diameter x 1.38-inch long volume around the relief valve must remain
open for proper relief valve operation.
NOTE: A Relief Valve Adapter Exhaust Kit (CTI- CRYOGENICS
P/N 8080250K008) is available. Refer to Appendix A and call you local
customer support center for more information.
The enhanced On-Board 8F Cryopump installation kit includes a 6 foot
(11.83 m) length of 1/2 inch ID (12.7 mm) poly tube with associated
fittings to allow venting of the cold exhaust as desired in cases where a
hard plumbed manifold is not used.
Roughing Pump Connection
NOTE: The roughing system must provide 10 cfm (measured at
atmosphere and at each On-Board GLE Cryopump) to successfully utilize
On-Board FastRegen capability.
Connect your On-Board GLE Cryopump to a roughing pump system using
a roughing line with the largest inside diameter possible to minimize the
roughing time required during start-up procedures prior to normal
operation. The roughing pump should have a blank-off pressure of less
than 20 microns.
The roughing pump connects to the On-Board GLE Cryopump roughing
valve as shown in
Figure 1-6 or Figure 1-7 . The valve will accept an ISO
NW-25 flange.
1. Install the roughing pump line to the On-Board GLE Cryopump
roughing valve port using the clamp provided. Tighten the
clamp securely.
Rough Valve Gas Connection
Attach the gas supply line from a 60-80 psig gas supply to the 1/8 NPTF
roughing valve fitting. Make sure to attach the gas supply line to the valve
fitting that has a filter screen at the attachment connection.
CAUTION
For the enhanced On-Board 8F Cryopump, if an exhaust manifold is used, it must have a
minimum ID of a 1/2 inch ID (12.7 mm).