Brooks On-Board 8, Installation And Maintenance Instructions Manual

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4-8 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
6. Immediately after Step 5, and while each On-Board GLE
Cryopump is still operating, disconnect the helium RETURN line at
all of the coldheads on the same manifold. The On-Board GLE
Cryopump helium return line is shown in
Figure .
Figure 4-2: On-Board GLE Cryopump Helium Supply and Return Lines
7. Immediately after Step 7, shut down all of the On-Board GLE
Cryopumps as described in the appropriate On-Board Module
Programming and Operation Instructions manual.
8. Warm the On-Board GLE Cryopumps to 300K as follows:
a. Regenerate each On-Board GLE Cryopump to be
decontaminated by pressing the REGEN button, followed
by 1 then 2 on the Network Terminal keypad.
b. When the pumps reach 300K, discontinue the regeneration
cycle by pressing REGEN and 0. Repeat this process on
each pump.
After Step 8 has been completed, all of the coldheads have been cooled and
the contaminant gases frozen in the coldhead. Helium gas lines have been
disconnected at the coldheads, and the coldheads warmed up to 300K. The
next step is to remove the contaminant from each coldhead in sequence.
9. Shut down the compressor.
10. Connect the two helium flexlines to the maintenance manifold and
the coldhead of the first On-Board GLE Cryopump to be
HELIUM SUPPLY LINE
HELIUM RETURN LINE
STATUS
RS-232
RELAYS
24V, 1 A
RS-232
REMOTE AUX TC
NETWORK