Brooks On-Board 8, Installation And Maintenance Instructions Manual

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1-14 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Figure 1-6:
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LEGEND
1. Power Conditioning Module (PCM)
2. On-Board Network Connector
3. On-Board Network Pump Identification Switch
4. Auxiliary Thermocouple Gauge Connector
5. Remote Keypad Connector
6. Helium Return Connector
7. Helium Supply Connector
8. Rough Pump Connection
9. Air Supply Connection (60 - 80 psi, 1/8 NPT)
10. Purge Gas Connection (10 - 25 psig or 40 - 80 psig) 1/8 NPT
11. Exhaust Purge Valve Vent
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Typical Flat On-Board 8 GLE Cryopump Component Identification