Brooks On-Board 8, Installation And Maintenance Instructions Manual

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4-12 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Step 5 - Method #3
While each On-Board GLE Cryopump is still operating, disconnect the
helium SUPPLY line at the compressor side of the common supply
manifold at the tool.
Step 6 - Method #3
While each On-Board GLE Cryopump is still operating, disconnect the
helium RETURN line at the compressor side of the common supply
manifold at the tool.
Step 10- Method #3
Verify that the compressor is off. Connect the two 5 foot helium flexlines to
the maintenance manifold and the compressor side of the common supply
and return manifold.
Steps 11 - 16 - Method #3
All connections are to the manifold, not the individual coldheads. All
coldhead drive motors are to be run for 10 to 30 seconds using the remote
keypads per Step 12d. At the end of Step 16, all of the On-Board GLE
CAUTION
Be sure to use two wrenches to ensure that the self sealing coupling adapter does not back
out during disassembly. Disconnect the helium supply line. Refer to
Figure 4-4 .