Brooks On-Board 8, Installation And Maintenance Instructions Manual

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2-2 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
On-Board GLE Cryopump Installation
The On-Board GLE Cryopump may be installed in any orientation without
affecting its performance.
Before mounting the On-Board GLE Cryopump to the vacuum system, a
high-vacuum isolation valve (Hi-Vac valve) should be installed between
the On-Board GLE Cryopump and the vacuum chamber to isolate the On-
Board GLE Cryopump from the chamber during rough pumping,
cooldown, and regeneration.
Install the On-Board GLE Cryopump on the vacuum system as follows:
1. Remove the protective cover from the main flange of the On-
Board GLE Cryopump.
2. Clean all sealing surfaces and install the O-ring or metal seal gasket
as appropriate.
3. Mount the On-Board GLE Cryopump to the Hi-Vac valve or
vacuum chamber mounting flange. Be sure all mounting bolts are
secure.
Vent Pipe Connection
The On-Board GLE Cryopump pressure relief valve can be vented directly
into the room or can be connected to an exhaust system.
WARNING
If toxic, corrosive, or flammable gases are pumped, a vent pipe must
be connected to the On-Board GLE Cryopump relief valve and directed
to a safe location.