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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide

©2013 Brooks Automation Inc.

Pub. No. 8040564, Rev. AA, 01/15/13

ECO No. 64541

1-15

Figure 1-7:

80K ARRAY

MOUNTING

RADIATION SHIELD

SECOND STAGE

15K ARRAY

VACUUM VESSEL

FIRST STAGE
HEATER

HEATER

FLANGE

STANDPIPE
FILTER

FIRST STAGE DIODE

Cutaway View of a Typical On-Board 8 GLE Cryopump Vessel

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Summary of Contents for On-Board 8

Page 1: ...On Board GLE Cryopump Installation and Maintenance Instructions 8040564 Revision AA...

Page 2: ...pTrak Marathon Marathon 2 Marathon Express Micro Ion MiniConvectron On Board Polycold Razor Simplicity Solutions the Simplicity Solutions logo Stabil Ion TrueBlue TurboPlus Vision Zaris and the Brooks...

Page 3: ...Module Option 1 6 Remote Operation Option 1 7 Specifications 1 8 Theory of Operation 1 9 Cold Head 1 10 Vacuum Vessel and Arrays 1 10 Compressor Gas and Oil Flows 1 10 Section 2 Installation Introduct...

Page 4: ...4 10 Method 1 Decontaminate All Cryopumps 4 10 Method 2 Decontamination of Only Cold Cryopumps 4 11 Method 3 Grouped Decontamination using Manifold 4 11 On Board GLE Cryopump Cleaning 4 14 Appendix A...

Page 5: ...pump Vessel 1 13 Figure 1 6 Typical Flat On Board 8 GLE Cryopump Component Identification 1 14 Figure 1 7 Cutaway View of a Typical On Board 8 GLE Cryopump Vessel 1 15 Figure 1 8 Typical On Board 8 Cr...

Page 6: ...This Page Left Intentionally Blank...

Page 7: ...e 1 1 On Board 8 GLE Cryopump Specifications 1 8 Table 1 2 On Board 8F GLE Cryopump Specifications 1 9 Table 3 1 Cryopump Troubleshooting Procedures 3 2 Table 3 1 Troubleshooting Procedures continued...

Page 8: ...This Page Left Intentionally Blank...

Page 9: ...cates a potentially hazardous situation or unsafe practice If not avoided the action may result in minor or moderate personal injury or equipment damage A CAUTION is highlighted in yellow CAUTION A si...

Page 10: ...contain safety shapes which have specific safety meanings The following table shows some of the safety shapes used in this document and their meanings References For more information about safety stan...

Page 11: ...ty of system or process contamination from the On Board Cryopump is eliminated Installation Operation and Maintenance Instructions On Board 8 GLE Cryopump Installation Operation and Maintenance Instru...

Page 12: ...1 2 2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 GLE Cryopump for a complete description of the numerous operational functions that are available...

Page 13: ...ressor Operation Installation and Maintenance Guide 2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 1 3 Figure 1 1 ON BOARD 8F CRYOPUMP ON BOARD 8 CRYOPUMP On Board 8 and On Boa...

Page 14: ...r to the On Board GLE Cryopump from a customer provided 208 VAC 50 60 Hz single phase power source The PCM provides constant 3 phase 60 Hz power to the On Board GLE Cryopump regardless of input AC lin...

Page 15: ...8600 Compressor Operation Installation and Maintenance Guide 2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 1 5 Figure 1 2 On Board 8F GLE Cryopump with PCM PCM ON BOARD 8F GLE...

Page 16: ...t computer The On Board Vacuum Network Controller Module is typically mounted on either side of the On Board 8 GLE Cryopump Module to minimize the space required for installation Refer to the On Board...

Page 17: ...d in multiple On Board 8 GLE Cryopump process tools is to network the On Board 8 GLE Cryopumps using the BITBUS protocol In this configuration the networked On Board 8 GLE Cryopumps are managed as a g...

Page 18: ...alve Purge Valve Cryopump TC Gauge 1st Stage Diode 2nd Stage Diode 1st Stage Heater 2nd Stage Heater 2 Setpoint Relays RS 232 Interface Pumping Speeds Water Air Hydrogen Argon 4000 liters sec 1500 lit...

Page 19: ...the vacuum vessel The cold Table 1 2 On Board 8F GLE Cryopump Specifications Parameter Specifications Input Power 208 VAC 50 60 Hz Rough Pump Connection NW 25 ISO KF Integrated Hardware Keypad Display...

Page 20: ...ore exiting through the helium gas return connector and returning to the compressor Helium expansion in the displacer regenerator assembly provides cooling at the first and second stage cold stations...

Page 21: ...11 cold head operation When cold head operation reaches a steady state condition further pressure regulation is unnecessary A typical On Board 8 GLE Cryopump system is shown in Figure 1 3 The locatio...

Page 22: ...01 15 13 ECO No 64541 Figure 1 4 Typical On Board 8 GLE Cryopump System WATER COMPRESSOR POWER VACUUM HELIUM RETURN HELIUM SUPPLY CRYOPUMP POWER 208 VAC 50 60 Hz 208 VAC 50 50 Hz STATUS RS 232 9600 C...

Page 23: ...uide 2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 1 13 Figure 1 5 80K ARRAY MOUNTING RADIATION SHIELD SECOND STAGE 15K ARRAY VACUUM VESSEL FIRST STAGE HEATER HEATER FLANGE CU...

Page 24: ...2 On Board Network Connector 3 On Board Network Pump Identification Switch 4 Auxiliary Thermocouple Gauge Connector 5 Remote Keypad Connector 6 Helium Return Connector 7 Helium Supply Connector 8 Rou...

Page 25: ...ooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 1 15 Figure 1 7 80K ARRAY MOUNTING RADIATION SHIELD SECOND STAGE 15K ARRAY VACUUM VESSEL FIRST STAGE HEATER HEATER FLANGE STANDPIPE FILT...

Page 26: ...Switch 7 On Board Network Connector 8 Power Conditioning Module 9 Status LED 13 10 9 6 8 7 15 10 RS 232 Computer Interface Connector 11 Module Power Indicator Lamp 12 RS 232 Computer Interface Connec...

Page 27: ...to Figure 2 1 and the appropriate installation procedure within this section for the type of On Board GLE Cryopump being installed Figure 2 1 Block Diagram for On Board GLE Cryopump Installation On Bo...

Page 28: ...generation Install the On Board GLE Cryopump on the vacuum system as follows 1 Remove the protective cover from the main flange of the On Board GLE Cryopump 2 Clean all sealing surfaces and install th...

Page 29: ...and at each On Board GLE Cryopump to successfully utilize On Board FastRegen capability Connect your On Board GLE Cryopump to a roughing pump system using a roughing line with the largest inside diame...

Page 30: ...supply and return line identification decals CTI CRYOGENICS supplied to their respective connectors Verify proper helium supply static pressure as described in the Installation Section of the appropr...

Page 31: ...appropriate On Board Module Programming and Operation Instructions for instructions on programming the setpoint relays 1 Determine whether your On Board equipment requires setpoint relay contacts to...

Page 32: ...o a rack and then connect it to the REMOTE connector on the On Board GLE Cryopump Module using the cable supplied with the remote keypad The On Board GLE Cryopump can be operated both from the remote...

Page 33: ...w the Hi Vac valve cryopump Leak checking below the Hi Vac valve should be performed with the On Board GLE Cryopump shut off and at room temperature Leak checking while the On Board GLE Cryopump is op...

Page 34: ...arrays is loose thereby preventing good thermal contact with its cold station on the cold head Warm the cryopump to ambi ent temperature and retighten the arrays to 15 20 inch pounds High base pressur...

Page 35: ...ave fully cleaned the adsorbing array Partial pres sures of non condensables hydrogen neon or helium may remain Regenerate the cryopump as described in the appropriate On Board Module Pro gramming and...

Page 36: ...This Page Left Intentionally Blank...

Page 37: ...ro Three methods of decontamination are described in Table 4 1 and on the following pages These methods all have isolating gaseous contamination in common by freezing them in one or more cold On Board...

Page 38: ...mp is cooled down then contaminated helium is the most probable cause All gases other than helium can freeze in the coldhead During manufacturing of On Board GLE Cryopump systems gaseous impurities ar...

Page 39: ...If any additional help is needed refer to Appendix A in this manual for the location of the nearest CTI CRYOGENICS Customer Support Center Equipment Tools Requirements The following tools and equipmen...

Page 40: ...On Board GLE Cryopump s to 300K Shut down compressor Slowly open ball valve on maintenance manifold and depressurize the coldhead to 30 50 psig Back fill coldhead to the correct static helium pressure...

Page 41: ...correct helium static charge Disconnect 5 foot flexlines from the decontaminated coldhead Connect helium SUPPLY line at coldheads on same manifold Connect helium RETURN line at coldheads on same mani...

Page 42: ...its performance may already be affected by contamination Close the high vacuum valves to isolate the On Board GLE Cryopumps from the vacuum chamber After Step 1 has been completed all of the coldhead...

Page 43: ...ium bottle regulator and charge line which are never separated Once Step 4 has been completed all of the coldheads have been cooled and the gaseous contaminant frozen in the coldhead The maintenance m...

Page 44: ...enerate each On Board GLE Cryopump to be decontaminated by pressing the REGEN button followed by 1 then 2 on the Network Terminal keypad b When the pumps reach 300K discontinue the regeneration cycle...

Page 45: ...with helium to the correct static charge pressure by adjusting the regulator to the required pressure and opening the Hoke valve on the manifold Close the Hoke valve when the pressure is correct b De...

Page 46: ...harge pressure NOTE Refer to the appropriate Compressor Installation Operation and Maintenance Instructions for the correct static helium charge pressure value and adjustment procedure NOTE The chargi...

Page 47: ...Board GLE Cryopumps where they will be frozen In this method the following Steps replace the corresponding Steps in Method 1 Step 1 Method 2 Any On Board GLE Cryopumps on the same manifold which are...

Page 48: ...the tool Step 10 Method 3 Verify that the compressor is off Connect the two 5 foot helium flexlines to the maintenance manifold and the compressor side of the common supply and return manifold Steps...

Page 49: ...040564 Rev AA 01 15 13 ECO No 64541 4 13 Cryopumps are decontaminated Figure 4 3 Helium Flex Line Connection Helium Pressure Gauge Ball Valve 99 999 Helium Connection Helium ON OFF Hoke Valve Relief V...

Page 50: ...other interior surfaces of the On Board GLE Cryopump vacuum vessel is seldom required because dust buildup does not affect performance and the special copper alloy cryo condensing arrays are nickel p...

Page 51: ...face of the vacuum vessel the 80K condensing array and the 80K radiation shield as follows a Wash each item in strong soap or detergent solution and hot water b Rinse the items in clean hot water c Ai...

Page 52: ...This Page Left Intentionally Blank...

Page 53: ...home page Guaranteed Up Time Support GUTS For 24 hour 7 day per week Guaranteed Up Time Support GUTS dial 800 367 4887 Inside the United States of America 508 337 5599 Outside the United States of Ame...

Page 54: ...This Page Left Intentionally Blank...

Page 55: ...system 1 1 O Oil flows and compressor gas 1 10 On Board 8 GLE Cryopump Installation operation and maintenance 1 1 specifications 1 8 On Board GLE Cryopump description 1 1 installation 2 1 maintenance...

Page 56: ...2013 Brooks Automation Inc Pub No 8040564 Rev AA 01 15 13 ECO No 64541 Index 2 This Page Left Intentionally Blank...

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