Brooks On-Board 8, Installation And Maintenance Instructions Manual

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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 3-3
Table 3-1: Troubleshooting Procedures (continued)
Problem Possible Cause Corrective Action
Cryopump fails to cool down
to the required operating tem-
perature or takes too long to
reach that temperature (20K). Low helium supply pressure. Add gas as described in the
9600 Compressor Manual.
Compressor problems. Refer to the 9600 Compres-
sor Manual .
Leak in vacuum system or
cryopump. Check the cryopump relief
valve for proper seating.
Check cryopump for leaks.
Check vacuum system for
leaks.
Incomplete regeneration may
not have fully cleaned the
adsorbing array. Partial pres-
sures of non-condensables
(hydrogen, neon or helium)
may remain. Regenerate the cryopump as
described in the appropriate
On-Board Module Pro-
gramming and Operation
Instructions.
No display. No power to On-Board GLE
Cryopump. Check electrical connec-
tions; be sure the power
switch at the compressor con-
troller is turned on. Check
fuses. If power is turned on,
try turning it off and on to
reboot the electronics.
Change electronics module.
Display does not update, and/
or keys do not function. Electronics has locked up. Try to reboot the system by
turning the On-Board power
switch located at the com-
pressor controller off and on.
Replace the On-Board elec-
tronic module.
Rough valve clicks but does
not open and close. Too little or no air pressure
to drive valve. Increase air pressure to 60
psig minimum, 80 psig maxi-
mum.