Brooks On-Board 8, Installation And Maintenance Instructions Manual

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1-8 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Specifications
Table 1-1: On-Board 8 GLE Cryopump Specifications
Parameter Specifications
Input Power 208 VAC 50/60 Hz
Rough Pump Connection NW 25 ISO KF
Integrated Hardware Keypad/Display
Roughing Valve
Purge Valve
Cryopump TC Gauge
1st Stage Diode
2nd Stage Diode
1st Stage Heater
2nd Stage Heater
2 Setpoint Relays
RS-232 Interface
Pumping Speeds:
Water
Air
Hydrogen
Argon
4000 liters/sec
1500 liters/sec
2200 liters/sec
1200 liters/sec
Argon Throughput 700 sccm (9 torr-liters/sec)
Capacity:
Argon
Hydrogen
1000 std. liters
12 std. liters @ 5 x 10
-6
torr
Crossover 150 torr-liters
Cooldown Time 2 hours nominal
Dimensions Refer to Installation/Interface Drawing
Weight 63 lbs.