Brooks GF135, Installation & Operation Manual

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Contents
1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital .................................... 1
1-2 LCD Display .................................................................................................................................. 7
1-3 Dimensions - GF100/GF120/GF125 Series ................................................................................. 15
1-4 Dimensions - GF135, DeviceNet .................................................................................................. 16
1-5 Dimensions - GF135, RS485 ....................................................................................................... 17
1-6 Dimensions - GF101/GF121/GF126 ............................................................................................ 18
1-8 Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications 19
2-1 Typical Gas Supply Arrangement with Non-PTI MFC .................................................................... 2
2
2-2 Typical Gas Supply Arrangement with PTI MFC ........................................................................... 2
2
2-3 GF100 Series Mounting Attitude Positions .................................................................................... 2
4
2-4 GF100 Series Mounted to K1 Series Substrate Blocks ................................................................. 2
5
2-5 Mounting Screws Torque Pattern .................................................................................................. 2
5
2-6 Display with PSI Reading .............................................................................................................. 2
7
2-7 Display Reading Zero PSI ............................................................................................................. 2
7
2-8 Display Set to %FS ...................................................................................................................... 2
8
2-9 % Flow Display Set to Zero .......................................................................................................... 2
8
2-10 MultiFlo Cable Adapter .................................................................................................................
30
2-11 USB-RS485 Converter (214F027AAA) ........................................................................................
30
2-12 Diagnostic Port Locations ............................................................................................................
30
2-13 GF100 Series DeviceNet Connection ..........................................................................................
31
2-14 GF100 Series with 9-Pin Analog Connector .................................................................................
32
2-15 Analog 9-Pin Connector (M) .........................................................................................................
32
2-16 GF100 with EtherCat Communications, M8 Power Connector Location ......................................
33
2-17 M8 Power Connector Drawing .....................................................................................................
33
2-18 GF100 Series Electrical Interface Options ..................................................................................
. 34
2-19 GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines ...........................................
35
3-1 GF100 Series Operating Principles ...............................................................................................
41
1-1 Industry Standard References .......................................................................................................
3
1-2 Terms and Acronyms ....................................................................................................................
4
1-3 Specifications for Standard GF100/GF120/GF125 Series .............................................................
9
1-4 Specifications for Safe Delivery System (SDS) GF120 Series ..................................................... 10
1-3 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications ....................... 11
1-6 Specifications for GF135 Series ................................................................................................... 12
1-7 Specifications for GF101/GF121/GF126 Series ........................................................................... 13
1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications ....................... 14
2-1 K1 Series Fasteners ...................................................................................................................... 2
5
2-2 K1 Substrate Torque Data .............................................................................................................2
5
2-3 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ................................................... 2
9
4-1 Environmental Factors .................................................................................................................. 4
4
4-2 GF100 Series Troubleshooting Guide ........................................................................................... 4
5
5-1 GF100, GF120 & GF125 Series Product Description Code .......................................................... 5
0
5-2 GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code ...... 5
1
5-3 Model GF135 Product Description Code ....................................................................................... 5
2
5-4 GF101, GF121 & GF126 Series Product Description Code .......................................................... 5
3
5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code ...... 5
4
A-1A GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50 ......................................................
56
A-1B GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50 ..................................................
57
A-1C GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50 ................................................
57
B-1 GF100 Series Patents ...................................................................................................................
58
Figures
Tables