Brooks GF135 Installation & Operation Manual Download Page 1

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Installation & Operation Manual

GF100 Series Metal Sealed, Thermal

Mass Flow Controllers & Meters

Summary of Contents for GF135

Page 1: ...Installation Operation Manual GF100 Series Metal Sealed Thermal Mass Flow Controllers Meters...

Page 2: ...electrical and pressure sources Operation 1 Slowly initiate flow into the system Open process valves slowly to avoid flow surges 2 Check for leaks around the flow meter inlet and outlet connections I...

Page 3: ...ries 24 Perform a Leak Test 26 Zeroing Setup Process 26 Zeroing the GF100 Series 26 Zeroing the GF100 Series Pressure Transducer from the LCD Display Panel 27 Zeroing GF100 Series Flow from LCD Displa...

Page 4: ...F135 Series Showing Inlet Outlet Pneumatic Isolation Valve Lines 35 3 1 GF100 Series Operating Principles 41 1 1 Industry Standard References 3 1 2 Terms and Acronyms 4 1 3 Specifications for Standard...

Page 5: ...y due to extremely low wetted surface area and corrosion resistant Hastelloy sensor and valve seat Optional model variations including pressure transient insensitivity PTI and Safe Delivery System SDS...

Page 6: ...ly hazardous situation which if not avoided COULD result in death or serious injury A CAUTION statement indicates a potentially hazardous situation which if not avoided MAY result in minor or moderate...

Page 7: ...s steel components SEMI F20 Specifications for 316L stainless steel bar extruded shapes plate and investment castings for components used in ultra high purity semi manufacturing applications SEMI F36...

Page 8: ...re package that configures gas and flow ranges MultiFlo Technology A physics based calibration methodology that enables gas and flow range configuration within a defined standard configuration PID Pro...

Page 9: ...ith excellent steady state stability Brooks MultiFlo technology offers unparalleled flexibility An extensive gas database is provided and a single device can be quickly programmed for thousands of dif...

Page 10: ...nsor technology Precise flow control with fast sub 1 second settling time 1 of reading accuracy Corrosion resistant Hastelloy C 22 sensor tube Optional Safe Delivery System SDS GF120 model only The Sa...

Page 11: ...face The mass flow controller is one of the most complex and critical components in gas delivery systems When dealing with ultra high purity gas distribution or highly toxic or corrosive gases removin...

Page 12: ...he ETG 5003 Semiconductor Device Profile specification A range of low profile adapter cables facilitate replacing previously installed devices eliminating the need to carry multiple devices of the sam...

Page 13: ...ility Zero Stability Zero Stability Zero Stability Zero Stability 0 5 F S per year Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficie...

Page 14: ...ttling Time to within Settling Time to within Settling Time to within Settling Time to within 2 F S 2 F S 2 F S 2 F S 2 F S 3 sec Warm Up Time Warm Up Time Warm Up Time Warm Up Time Warm Up Time minim...

Page 15: ...s 7201 55000 sccm 15 45 psid consult factory Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure 500 psia max 100 psi...

Page 16: ...e Range e Range e Range e Range e Range 3 860 sccm 7 45 psid 861 5000 sccm 10 45 psid Typical pressure drop Actual pressure drop will be gas and flow dependent Argon gas applications require higher di...

Page 17: ...150 psig Leak Integrity external Leak Integrity external Leak Integrity external Leak Integrity external Leak Integrity external 1x10 10 atm cc sec He Mechanical Mechanical Mechanical Mechanical Mecha...

Page 18: ...rity external Leak Integrity external Leak Integrity external Leak Integrity external Leak Integrity external 1x10 10 atm cc sec He Mechanical Mechanical Mechanical Mechanical Mechanical Valve Type Va...

Page 19: ...m 5 00in WX W SEAL 92mm 3 62in 105mm 4 13in 22mm 0 86in 28mm 1 12in 83mm 3 28in 25mm 1 00in 127mm 5 00in DX C SEAL 79 8mm 3 14in 93mm 3 66in 22mm 0 86in 28mm 1 12in 72mm 2 82in 25mm 1 00in 127mm 5 00i...

Page 20: ...16 Section 1 Introduction Model GF135 DeviceNet VCR Connections Model GF135 DeviceNet C Seal Connections Figure 1 4 Dimensions GF135 DeviceNet...

Page 21: ...17 Section 1 Introduction Model GF135 RS485 VCR Connections Model GF135 RS485 C Seal Connections Figure 1 5 Dimensions GF135 Series RS485...

Page 22: ...18 Section 1 Introduction Figure 1 6 Dimensions GF101 GF121 GF126 VCR Configurations C Seal Configurations...

Page 23: ...19 Section 1 Introduction Figure 1 7 Dimensions GF100 GF120 GF125 GF101 GF121 GF126 Series with EtherCAT Communications EtherCAT VCR Configurations EtherCAT Downport Configurations...

Page 24: ...move the outer bag only Pass the device into your clean area Remove the second clean room compatible bag only when the device is ready to be tested and or installed in your clean system Recommended St...

Page 25: ...service centers Gas Connections Prior to installation ensure that all piping is clean and free from obstructions Install piping in such a manner that permits easy access to the device if removal becom...

Page 26: ...configure standard configurations SHs or blanks for a variety of pure gases and mixtures As a result MultiFlo technology enables the user to reduce unique inventory requirements Flow Controller Insta...

Page 27: ...xposure of the process gas to the gas line 2 Cycle purge the gas line with dry nitrogen or argon to fully flush out the process gas Cycle purging consists of evacuating to a low pressure adequate to i...

Page 28: ...tin FSB 001 0015 for futher information If your GF100 Series is configured with downported fittings follow Steps 1 though 4 below If your GF100 Series has VCR fittings proceed to Step 5 1 Refer to Fig...

Page 29: ...cturer recommendations Figure 2 4 GF100 Series Mounted to K1 Series Substrate Blocks 1 3 4 2 Connection Fastener Size K1S K1R2 K1H GF 100 Series M4 x 34mm M5 x 30mm M5 x 37mm to or Subtstrate M4 x 35m...

Page 30: ...control valve inside the GF100 Series 3 Provide a 100 setpoint to the GF100 Series for no longer than 60 seconds This equalizes the pressure across the PID control valve 4 Refer to Figure 2 1 Close t...

Page 31: ...t the top of the GF100 Series press the Display button starting at the MACID four times to PSI or five times to kPa or until the LCD displays the labels PSI or kPa The GF100 Series will display pressu...

Page 32: ...isplay 3 Press and hold down the Zero button for a minimum of 5 seconds or until the FS display reads 0 0 as shown in Figure 2 9 The FS label will flash during this procedure Figure 2 8 Display Set to...

Page 33: ...030L 040L 055L 3 10 sccm 11 30 sccm 31 92 sccm 93 280 sccm 281 860 sccm 861 2600 sccm 2601 7200 sccm 7201 15000 sccm 15001 30000 sccm 30001 40000 sccm 40001 55000 sccm The MultiFlo Configurator interf...

Page 34: ...unication the diagnostic port must be used to interface with the MultiFlo Configurator Ensure the M8 power connector is attached and the device is powered on Only after the device is powered on attach...

Page 35: ...Start Guide for installation and operation details Download the MultiFlo Configurator software into your computer from the Brooks Instrument website www BrooksInstrument com MultiFlo Install the Mult...

Page 36: ...ors shown in Figure 2 14 Figure 2 15 Analog 9 Pin Connector M PIN Connection 1 Valve Control 2 Output 0 5 Vdc 3 15 Vdc 4 Power Common 5 15 Vdc 6 Setpoint 0 5 Vdc 7 Signal Common 8 RS485 DX 9 RS485 DX...

Page 37: ...tor The M8 connector is located on the upper inlet side of the device Refer to Figures 2 16 and 2 17 below Figure 2 17 M8 Power Connector Drawing PIN Connection 1 24V 3 Power Common Figure 2 16 GF100...

Page 38: ...ries Please con e available for the GF Series Please con e available for the GF Series Please con e available for the GF Series Please contact Br tact Br tact Br tact Br tact Brooks ooks ooks ooks ook...

Page 39: ...pstream pneumatic isolation valve Note The air passes through a failsafe normally open valve inside the GF135 and is connected back to the inlet isolation valve For safe operation and in line with S2...

Page 40: ...nt Computer that runs a Windows operating system Power either DeviceNet or RS485 to the device or M8 EtherCAT power Need gas supply for pneumatic valve 90 3 psi BB 485 to 232 converter or approved USB...

Page 41: ...led 3 Click on the Commission button to begin the process Some intermediate messages will appear on the bottom mesage bar You will then be presented the option to override the current inlet gas pressu...

Page 42: ...r to actual commissioning Selecting Yes will continue the process By selecting No the commissioning process will end 5 After numerous checks are performed the auto volume will start This will take app...

Page 43: ...e the auto volume and the K1 set points are complete the program will go back to the initial screen In addition the overall run time will be displayed From here another device or the same one again ma...

Page 44: ...he flow streams is caused by the restrictor During flow conditions there will be a pressure differential across the restrictor that forces gas to flow in the sensor The pressure difference caused by t...

Page 45: ...ransducer not included in the GF100 and the GF120 Incoming pressure fluctuation results in a signal that is proportional to fluctuation 2 The signal from the pressure transducer is inverted and then s...

Page 46: ...Center for cleaning and recalibration Please follow the instructions for removal product packaging and product return instructions found in Section 2 Installation Return Shipment All active process in...

Page 47: ...43 Section 4 Maintenance Troubleshooting...

Page 48: ...Verify isolations valves are open and the gas supply is turned on Then verify operating pressures are within operating ranges 5 Check GF100 Series voltage response by moving the setpoint back and for...

Page 49: ...er too high or too low and range If required adjust inlet outlet pressure to achieve proper pressure reading NOTE If the differential pressure is too high voltage to the will be zero which is abnormal...

Page 50: ...t is decreased below this point the GF100 Series signal remains at some value higher than the setpoint Is the gas inlet outlet differential Verify that the pressure is correct for pressure too high or...

Page 51: ...off Is the differential pressure across Verify that the pressure is correct for the GF100 Series really zero the gas and range If the GF100 Series has been contaminated it may not be able to close an...

Page 52: ...es the wrong full scale value for GF100 Series Older version of Multiflo Configurator used to program GF100 Series 13 GF100 Series dumps large volume of gas into chamber when setpoint is commanded fro...

Page 53: ...ard Configuration 41 11 30 sccm Nitrogen Equivalent 0 C Reference SH42 092C SH42 092C SH42 092C SH42 092C SH42 092C Standard Configuration 42 31 92 sccm Nitrogen Equivalent 0 C Reference SH43 280C SH4...

Page 54: ...adapter with 9 pin STEC pin out jack screws w VTP Unit F O adapts SX base GX GX GX GX GX 9 Pin D with RS485 Unit G display and overlay 180o o o o o orientation Not Available on 79 8mm fitting DX YX EX...

Page 55: ...SH41 030C SH41 030C SH41 030C SH41 030C Standard Configuration 41 11 30 sccm Nitrogen Equivalent SH42 092C SH42 092C SH42 092C SH42 092C SH42 092C Standard Configuration 42 31 92 sccm Nitrogen Equiva...

Page 56: ...l IO Poll IO External Power On Full Scale Full Scale Full Scale Instance Instance State Baud I O Connector State Setting Setting Setting Producer Consumer Transition Rate D0 D0 D0 D0 D0 DeviceNet 5 Pi...

Page 57: ...C1 C1 C1 C1 C1 1 1 2 body width 92mm 3 8 C Seal C2 C2 C2 C2 C2 1 1 2 body width 114mm 3 8 C Seal VIII VIII VIII VIII VIII Downstream Condition A A A A A Atmosphere V V V V V Vacuum IX IX IX IX IX Sens...

Page 58: ...XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX Specific Gas Code Range i e 0004 Argon and 010L 10 slpm SH51 055L SH51 055L SH51 055L SH51 055L SH51 055L Standard Configuration 51 55 001 sccm N2 Equival...

Page 59: ...ange in sccm C or slm L ex 500C b If SH Bin enter defined maximum flow ex 860 choosing SH44 281 860 sccm 7 Fitting a Enter 2 character option code as defined ex CX 1 1 8 C Seal 92mm 8 Downstream Condi...

Page 60: ...53 157 158 483 484 1459 1460 3800 3801 7920 7921 15800 33 CH3F Methyl Fluoride 24 7 29 7 3 7 8 22 23 67 68 204 205 625 626 1890 1891 5200 5201 10600 10601 21200 34 COS Carbonyl Sulfide 24 7 29 7 3 7 8...

Page 61: ...155 465 466 1200 1201 2500 2501 5100 129 C4F8 Octafluorocyclobutane 19 7 19 7 3 5 6 16 17 50 51 154 155 465 466 1170 1171 2430 2431 4900 138 C3F6 Hexafluoropropylene 19 7 19 7 3 6 7 20 21 60 61 184 18...

Page 62: ...pparatus for pressure compensation in a mass flow controller 7082824 Variable resistance sensor with common reference leg 7113895 System and method for filtering output in mass flow controllers and ma...

Page 63: ...U CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify...

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Brooks GF135, Installation & Operation Manual

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