20
Section 2 Installation
General
This section provides installation instructions for the Brooks GF100 Series
Thermal Mass Flow Devices. The installation process consists of purging
the gas supply line prior to installation, unpacking and inspecting the
device, connecting the device to the gas supply line and testing for leaks.
Receipt of Equipment
When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability.
A report should be submitted to the nearest Brooks Instrument location
listed on the Global Service Network page on our website:
BrooksInstrument.com/GlobalSupportCenters
This device has been assembled, calibrated, and double-vacuum bagged
in a Class 100 clean room. In your semi-clean area, remove the outer bag
only. Pass the device into your clean area. Remove the second clean room
compatible bag only when the device is ready to be tested and/or installed
in your clean system.
Recommended Storage Practice
If intermediate or long-term storage of the device is required, it is
recommended that it be stored in accordance with the following conditions:
• Within the original shipping container.
• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C
(45°F) minimum.
• Relative humidity 45% nominal, 60% maximum, 25% minimum.
Return Shipment
Prior to returning any instrument to the factory for any reason, visit our
website for instructions on how to obtain a Return Materials Authorization
Number (RMA #) and complete a Decontamination Statement to
accompany it:
BrooksInstrument.com/Service
. All instruments returned to
Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the instrument. Failure to provide this information will delay
processing of the instrument.
Instrument must have been purged in accordance with the following:
