Brooks GF135, Installation & Operation Manual

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Section 5 Product Description Code
Table 5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code
Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option Code Option Code Option Option Description Option Description Option Description Option Description Option Description
I. I.
I. I. I. Base Model Code
GF GF
GF GF GF High Purity/Ultra High Purity Digital Mass Flow Controllers
II. II. II. II. II. Package / Finish Specifications 101 101 101 101 101 Flow range 55 - 300 slm N2 Equivalent.; 10 Ra HP wetted flow path
121 121
121 121
121 Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path
126 126 126 126 126 Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path & integrated pressure measurement
III. III. III. III. III. Configurability C C C C C MultiFlo capable. Standard bins or specific gas/range may be selected
X X X X X Not MultiFlo capable. Specific gas/range required
IV. IV. IV. IV. IV. Special Application XX XX XX XX XX Standard
V. V. V. V. V. Valve Configuration C C C C C Normally Closed valve
M M M M M Meter (No Valve)
VI. VI. VI. VI. VI. Gas or SH MultiFlo Bin XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX Specific Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm
SH51 055L SH51 055L
SH51 055L SH51 055L SH51 055L Standard Configuration #51, 55,001 sccm N2 Equivalent (0°C Reference)
SH52 100L SH52 100L SH52 100L SH52 100L SH52 100L Standard Configuration #52, 55,002-100,000 sccm N2 Equivalent (0°C Reference)
SH53 200L SH53 200L SH53 200L SH53 200L SH53 200L Standard Configuration #53, 100,001-200,000 sccm N2 Equivalent (0°C Reference)
SH54 300L SH54 300L
SH54 300L SH54 300L
SH54 300L Standard Configuration #54, 200,001-300,000 N2 Equivalent (0°C Reference)
VII. VII.
VII. VII. VII. Fitting
V1 V1
V1 V1 V1 1-1/2” body width, 134mm 1/2” VCR male
C1 C1 C1 C1 C1 1-1/2” body width, 92mm C Seal
C2 C2 C2 C2 C2 1-1/2” body width, 114mm C Seal
VIII. VIII. VIII. VIII. VIII. Downstream Condition A A A A A Atmosphere
V V
V V V Vacuum
IX. IX. IX. IX. IX. Sensor O O O O O Default Sensor Orientation
X. X. X. X. X. Connector E0 E0 E0 E0 E0 EtherCAT Communication
XI. XI. XI. XI. XI. Customer Special Request XXXX XXXX XXXX XXXX XXXX Customer Special Request (CSR) Number
XII. XII.
XII. XII.
XII. Auto Shut-Off A A
A A
A Auto Shut-Off (Included)
X X X X X Auto Shut-Off (Not Included)
XIII. XIII. XIII. XIII. XIII. Auto Zero X X X X X Auto Zero (Not Included)
XIV. XIV.
XIV. XIV.
XIV. Reference Temperature 000 000
000 000
000 0
o oo oo
C Reference Calibration (Standard) - Default Setting