Brooks GF135, Installation & Operation Manual

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Section 5 Product Description Code
Table 5-3 Model GF135 Product Description Code
Example Model Code Example Model Code Example Model Code Example Model Code Example Model Code
IIIII II IIII
IIII
III III
III III
III IV IV
IV IV
IV VVVVV VI VI
VI VI
VI VII VII
VII VII
VII VIII VIII
VIII VIII
VIII IX IX
IX IX
IX XXXXX XI XI
XI XI
XI XII XII
XII XII
XII XIII XIII
XIII XIII
XIII XIV XIV
XIV XIV
XIV
GF GF
GF GF
GF 135 135
135 135
135 XXXXX XX XX
XX XX
XX CCCCC XXXX XXXX XXXX XXXX
XXXX XXXX XXXX XXXX
XXXX XXXX VX VX
VX VX
VX AAAAA O O
O O
O D1 D1
D1 D1
D1 XXXX XXXX
XXXX XXXX
XXXX AAAAA AAAAA 000 000
000 000
000
Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option Code Option Code Option Option Description Option Description Option Description Option Description Option Description
I.I.I.I.I. Base Model Code GF GF
GF GF
GF
II. II.
II. II. II. Package/Finish Specifications
135 135
135 135 135 Pressure Transient Insensitive (PTI) Ultra High Purity Advanced Diagnostic MFC
III. III. III. III. III. Configurability XXXXX Gas specific
IV IV IV IV IV..... Special Application XX XX XX XX XX Standard Application
VVVVV.....Valve Configuration CCCCC Normally Closed Valve
VI. VI.
VI. VI.
VI.Specific Gas Code & Range, XXXX XXXX XXXX XXXX
XXXX XXXX XXXX XXXX
XXXX XXXX Specify Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm
VII. VII.
VII. VII. VII. Fitting
VX VX
VX VX VX 1 1/2" VCR 1/4"
CX CX CX CX CX 1 1/8" C Seal 92mm
WX WX WX WX WX 1 1/8" W Seal 92mm (FUTURE RELEASE)
VIII. VIII. VIII. VIII. VIII. Downstream Condition AAAAA Atmosphere
VVVVV Vacuum
IX. IX.
IX. IX. IX. Sensor
O O
O O O Default Orientation
X. X. X. X. X. Connector DeviceNet Standard Configuration Parameters
Poll IO Poll IO Poll IO External
Power On Full Scale Full Scale Full Scale Instance Instance State Baud
I/O Connector State Setting Setting Setting Producer Consumer Transition Rate
D0 D0
D0 D0
D0 DeviceNet 5 Pin Micro Idle Count Integer 6000h 2 7 Executing 500KB
D1 D1
D1 D1 D1 DeviceNet 5 Pin Micro Idle Count Integer 6000h 21 7 Executing 500KB
D2 D2 D2 D2 D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB
D3 D3 D3 D3 D3 DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 7 Executing 500KB
D4 D4 D4 D4 D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB
D5 D5
D5 D5
D5 DeviceNet 5 Pin Micro Idle Count Integer 6000h 6 8 Executing 500KB
D6 D6
D6 D6 D6 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Executing 500KB
D7 D7 D7 D7 D7 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 6 8 Executing 500KB
D8 D8 D8 D8 D8 DeviceNet 5 Pin Micro Idle Count Integer 6000h 3 7 Executing 500KB
D9 D9 D9 D9 D9 DeviceNet 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB
D D
D D
DAAAAA DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 22 7 Executing 500KB
DB DB
DB DB DB DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 8 Executing 500KB
DC DC DC DC DC DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Idle 500KB
DD DD DD DD DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB
DE DE DE DE DE DeviceNet 5 Pin Micro Executing SCCM Float 6000h 15 19 Executing 500KB
D D
D D
DXXXXX DeviceNet 5 Pin Micro To be defined by CSR
G2 G2
G2 G2 G2 Analog/RS485 9 Pin D NA NA NA NA NA NA NA NA
XI. XI.
XI. XI.
XI. Customer Special Request XXXX XXXX
XXXX XXXX
XXXX Customer Special Request Number
XII. XII.
XII. XII. XII. Auto Shut-Off
AAAAA
Auto Shut Off (Included)
XXXXX Auto Shut Off (Not Included)
XIII. XIII. XIII. XIII. XIII. Auto Zero AAAAA Auto Zero (Included)
XXXXX Auto Zero (Not Included)
XIV XIV
XIV XIV
XIV..... Reference Temperature 000 000
000 000
000 0°C Reference Calibration (Standard) - Default Setting