Brooks GF135, Installation & Operation Manual

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11
Section 1 Introduction
Table 1-5 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications
Performance Performance
Performance Performance
Performance
GF100 GF100 GF100 GF100 GF100 GF120 GF120 GF120 GF120 GF120 GF125 GF125 GF125 GF125 GF125 GF120XSL GF120XSL GF120XSL GF120XSL GF120XSL GF120XSD GF120XSD GF120XSD GF120XSD GF120XSD
Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range 3 sccm to 55 slm 4 sccm to 25 sccm >25 sccm to 1 slpm
Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy +1% S.P. > 20-100%; +0.2% F.S. 2-20% ±1% S.P. 35-100%; ±0.35% F.S. 2-35%
Repeatability & Reproducibility Repeatability & Reproducibility
Repeatability & Reproducibility Repeatability & Reproducibility
Repeatability & Reproducibility < + 0.15% S.P.
Flow Settling Time (NC Valve) Flow Settling Time (NC Valve)
Flow Settling Time (NC Valve) Flow Settling Time (NC Valve) Flow Settling Time (NC Valve) 300ms (3-860 sccm N2 Eq.)
< 1 sec 700ms 400ms (861-7200 sccm N2 Eq.) < 3 sec
500ms (7201-30000 sccm N2 Eq.)
<700ms (30001-55000 sccm N2 Eq.)
Flow Settling Time (NO Valve) Flow Settling Time (NO Valve) Flow Settling Time (NO Valve) Flow Settling Time (NO Valve) Flow Settling Time (NO Valve) <1.5 sec ----------
Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Not Applicable < 1% S.P. up to 5 psi/sec ----------
upstream press. spike
Control Range Control Range Control Range Control Range Control Range 2-100% (Normally Closed Valve) 2-100% (Normally Closed Valve)
3-100% (Normally Open Valve)
MultiFlo MultiFlo MultiFlo MultiFlo MultiFlo Standard ----------
#of Bins #of Bins
#of Bins #of Bins
#of Bins 11 bins ----------
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) 0.15% of F.S. <1% of F.S.
Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) 2% of F.S. ----------
Zero Stability Zero Stability Zero Stability Zero Stability Zero Stability < + 0.15% F.S. per year < + 0.6% F.S. per year
Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Zero: 0.005% F.S. per
o
C Zero 0.005% of F.S. per °C
Ratings Ratings
Ratings Ratings
Ratings
Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range 10-50
o
C
Differential Pressure Range* Differential Pressure Range*
Differential Pressure Range* Differential Pressure Range* Differential Pressure Range* 3-860 sccm = 7-45 psid 10 Torr - 30 psid typical
861- 7200 sccm = 10-45 psid For more details
7201-55000 sccm = 15-45 psid consult factory
Maximum Operating Pressure Maximum Operating Pressure
Maximum Operating Pressure Maximum Operating Pressure
Maximum Operating Pressure 500 psia max 100 psia max up to 500 psia max
Leak Integrity (external) Leak Integrity (external)
Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) 1x10^ -10 atm. cc/sec He
Mechanical Mechanical Mechanical Mechanical Mechanical
Valve Type Valve Type Valve Type Valve Type Valve Type Normally Closed Normally Closed
Normally Open
Meter (no valve)
Wetted Materials Wetted Materials Wetted Materials Wetted Materials Wetted Materials SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
Surface Finish Surface Finish Surface Finish Surface Finish Surface Finish 10
μ
inch Ra 5
μ
inch Ra 5
μ
inch Ra
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights Status Lights Status Lights Status Lights Status Lights Run, Error, Power, Network Status
Alarms Alarms Alarms Alarms Alarms Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag
Display Type Display Type
Display Type Display Type
Display Type Top Mount Integrated LCD
V V
V V Viewing Angle / Viewing Distance
iewing Angle / Viewing Distance
iewing Angle / Viewing Distance iewing Angle / Viewing Distance iewing Angle / Viewing Distance Rotatable / 10 feet
U U U U Units Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution Flow (%), Temp. ( o C), Pressure (psia, kPa) / 0.1 (unit)
Electrical Electrical Electrical Electrical Electrical
Electrical Connection Electrical Connection Electrical Connection Electrical Connection Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks
Digital Communication Digital Communication
Digital Communication Digital Communication
Digital Communication EtherCAT
Diagnostic /Service Port Diagnostic /Service Port
Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port Micro-USB
Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption 320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)
Compliance Compliance
Compliance Compliance
Compliance
EMC EMC EMC EMC EMC EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013
Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance RoHS Directive (2011/65/EU)
REACH Directive EC (1907/2006)
*Argon gas applications require an additional 10 psid differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on
outlet (example SiCl4). Contact Brooks Technical Support for more information.