10
Section 1 Introduction
Table 1-4 Specifications for Safe Delivery System (SDS) GF120 Series
GF120XSL
GF120XSL
GF120XSL
GF120XSL
GF120XSL
GF120XSD
GF120XSD
GF120XSD
GF120XSD
GF120XSD
GF120XSD
GF120XSD
GF120XSD
GF120XSD
GF120XSD
GF120XSL
GF120XSL
GF120XSL
GF120XSL
GF120XSL
*Performance at minimum inlet pressure will be gas and flow range dependent. Consult Technical Support for details.
**Typical pressure drop. Actual pressure drop will be gas and flow dependent. Consult Technical Support for details.
***Consult factory for other gases.
Performance
Performance
Performance
Performance
Performance
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
2
2
2
2
2
Eq.)
Eq.)
Eq.)
Eq.)
Eq.)
4 - 25 sccm
>25 to 1 slpm
Gases Supported
Gases Supported
Gases Supported
Gases Supported
Gases Supported
AsH
3
, PH
3
, BF
3
, SiF
4
, Ar, Xe, N
2
O, N
2
, GeF4, AsF5, PF3,
H2Se, HMDSO, HMDSN, H2O***
MultiFlo Programmable
MultiFlo Programmable
MultiFlo Programmable
MultiFlo Programmable
MultiFlo Programmable
Not Configurable
Flow Accuracy
Flow Accuracy
Flow Accuracy
Flow Accuracy
Flow Accuracy
+/-1% S.P. >35% F.S. +/-0.35% F.S. <35% F.S.
Repeatability & Reproducibility
Repeatability & Reproducibility
Repeatability & Reproducibility
Repeatability & Reproducibility
Repeatability & Reproducibility
<+/- 0.15% S.P.
Zero Stability
Zero Stability
Zero Stability
Zero Stability
Zero Stability
<=0.6% F.S. per year
Settling Time (to within
Settling Time (to within
Settling Time (to within
Settling Time (to within
Settling Time (to
+
+
+
+2% F.S.)
2% F.S.)
2% F.S.)
2% F.S.)
2% F.S.)
< 3 sec
Warm Up Time
Warm Up Time
Warm Up Time
Warm Up Time
Warm Up Time
minimum of 30 minutes
Leak Integrity
Leak Integrity
Leak Integrity
Leak Integrity
Leak Integrity
1X10
-11
atm. cc/sec He
Valve Shut Down (Leaky by)
Valve Shut Down (Leaky by)
Valve Shut Down (Leaky by)
Valve Shut Down (Leaky by)
Valve Shut Down (Leaky by)
<1% F.S.
Operating Conditions
Operating Conditions
Operating Conditions
Operating Conditions
Operating Conditions
Minimum Operating Inlet Pressure*
Minimum Operating Inlet Pressure*
Minimum Operating Inlet Pressure*
Minimum Operating Inlet Pressure*
Minimum Operating Inlet Pressure*
4 to 20 sccm < 10 Torr
>20 to 50 sccm < 20 Torr
>50 sccm to 1 slpm < 50 Torr
Maximum Pressure
Maximum Pressure
Maximum Pressure
Maximum Pressure
Maximum Pressure
500 psia max
Pressure Insensitivity
Pressure Insensitivity
Pressure Insensitivity
Pressure Insensitivity
Pressure Insensitivity
Not Available
DifferentialPressure**
DifferentialPressure**
DifferentialPressure**
DifferentialPressure**
DifferentialPressure**
10 Torr-30 psid typical (1.33-207 kPa typical)
Valve Configuration
Valve Configuration
Valve Configuration
Valve Configuration
Valve Configuration
Normally Closed
Ambient Temperature Range
Ambient Temperature Range
Ambient Temperature Range
Ambient Temperature Range
Ambient Temperature Range
10
O
C-50
O
C
Zero Temperature Coefficient
Zero Temperature Coefficient
Zero Temperature Coefficient
Zero Temperature Coefficient
Zero Temperature Coefficient
Span: 0.05% SP per
O
C, Zero: 0.005% F.S. per
O
C
