75
Technical Data for MCE and MCES Flow Mass Flow Controllers
0 – 0.5 sccm Full Scale through 0 – 20 slpm Full Scale
MCE
mass flow controllers are built with a proportional valve positioned within the base of the unit.
Please contact Alicat for MCE controller application information.
MCES
controllers are for use with aggressive gases.
Standard Operating Specifications (Contact Alicat for available options)
Performance
MCE & MCES Mass Flow Controller
Accuracy at calibration conditions
after tare
± (0.8% of R 0.2% of Full Scale)
High Accuracy at calibration conditions
after tare
± (0.4% of R 0.2% of Full Scale)
Repeatability
± 0.2% Full Scale
Zero Shift and Span Shift
0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio
0.5% to 100% Full Scale / 200:1 Turndown 1% to 100% Full Scale / 100:1 Turndown
Maximum Controllable Flow Rate
102.4% Full Scale
Maximum Measurable Flow Rate
up to 128% Full Scale (Gas Dependent)
Typical Response Time
100 ms (Adjustable)
Warm-up Time
< 1 Second
Communications / Power
MCE & MCES Mass Flow Controller
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Input/Output Signal
1
Options
RS-232 Serial / RS-485 Serial / Modbus / EtherNet IP / DeviceNet / PROFIBUS
Analog Input/Output Signal
2
Options
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options
8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking
Supply Voltage
12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Supply Current
0.250 Amp
1. The
Digital Output Signal
communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The
Analog Output Signal
and
Optional Secondary Analog Output Signal
communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
Operating Conditions
MCE & MCES Mass Flow Controller
Mass Reference Conditions (STP)
25ºC & 14.696 psia (standard — others available on request)
Operating Temperature
−10 to +60 ºCelsius
Humidity Range
(Non–Condensing)
0 to 100%
Max. Internal Pressure (Static)
145 psig
Proof Pressure
175 psig
Mounting Attitude Sensitivity
None
Valve Type
Normally Closed
Ingress Protection
IP40
Wetted Materials
MCE
: 303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Rein-
forced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR
Stainless Steel, Silicon, Glass.
MCES
: 316LSS, 303SS, 430FRSS, FFKM (Kalrez) standard, Viton, EPDM, Buna,
Neoprene as needed for some gases.
If your application demands a different material, please contact Alicat.
Range Specific Specifications
Full Scale Flow Mass
Controller
Pressure Drop at FS Flow
(psid) venting to atmosphere
Mechanical
Dimensions
Process Connections
1
MCE
0.5 sccm to 50 sccm
1.0
4.6”H x 4.9”W x 1.5”D
1/4” VCR® Male
MCE
100 sccm to 500 sccm
1.0
MCE
1 slpm
1.5
MCE
2 slpm
3.0
MCE
5 slpm
2.0
MCE
10 slpm
5.5
MCE
20 slpm
20.0
1. Compatible with Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings. VCR and SAE
connections upon request.