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<7. Trouble Shooting>
7-3
IM 80J01A01-01E
Problem
Probable Cause / Corrective Action
The laser calibrating function does
not operate properly.
Output power of lasers does not
stabilize.
⇒
After while, re-calibrate them.
⇒
In case of failure in re-calibration,
please contact the dealer
※
1
.
⇒
Confirm that CQ1 Main Unit is
turned on.
CQ1 Software freezes. / Change
between
“CQ” and “HDD” modes can
not be done.
Is the sample loading port open?
⇒
Close it.
It might be that
“OFFLINE” and
“Laser: LOCKED” are displayed in
status panel (refer to
⇒
Please do following procedure.
①
Close CQ1 Software.
②
Confirm that power switch and key
switch of Utility Box are ON.
③
Confirm ready lamp on Utility Box
is turned on. If it is blinking, wait
until stop blinking (about 1
minute).
④
Start CQ1 Software.
Measurement protocol can not be
read.
It might be that different Stage
Attachment is set.
⇒
Set Stage Attachment designated
in measurement protocol.
Chamber temperature
doesn’t get to
setting temperature.
Setting temperature might be low.
⇒
Confirm setting temperature and
set proper temperature.
Is chamber temperature set over than
room tempe 5
℃
?
⇒
Confirm room temperature and set
proper chamber temperature
CO
2
, O
2
concentrations of Gas Mixer
don’t get to setting concentration.
Remaining amount of each gas
cylinder might not be enough
⇒
Confirm remaining amount of
each gas cylinder.
Tubes might be buckled or collapsed.
⇒
Confirm tubes and if there are
abnormalities, please fix it.
Is outlet pressure of regulator proper?
⇒
Set it in the range of 0.1
– 0.15
MPa
Measurement data cannot be found
by HDD mode.
Confirm that the folder designated to
“Measurement List” is proper.
⇒
Designate the upper folder of
measurement data folder, whose
name is as <date_****>.
Sometimes temperature display
isn’t
renewed.
⇒
Temperature display is renewed
at the time point that more than 5
minute elapse from previous
display renewal.
※
1
In the case of inquiring the dealer about trouble, it may need to send system log file.
For outputting of log file, please refer to page
Содержание CQ1
Страница 2: ...This document corresponds to the following versions of software Measurement software R1 04 ...
Страница 8: ...vi IM 80J01A01 01E Right Side of Utility Box Aperture label ...
Страница 24: ......
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Страница 177: ... 5 Functions of CQ1 Software 5 81 IM 80J01A01 01E Drag tab to move the window ...
Страница 178: ...5 82 5 Functions of CQ1 Software IM 80J01A01 01E Drag tab to square mark as following to add the tab to the window ...
Страница 187: ... 5 Functions of CQ1 Software 5 91 IM 80J01A01 01E 4 Area Window Display image of Area by tile Change to Area from Field ...
Страница 236: ......
Страница 238: ......
Страница 252: ...7 14 7 Trouble Shooting IM 80J01A01 01E Set sub cover and tighten 2 screws ...
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Страница 266: ......