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6.1

　

Overview

43

6

Table 6-1

　

LOCAL and REMOTE Modes

Fig. 6-1

　

Operation Mode Transition Diagram

Mode

Lamp state

START/STOP procedure

LOCAL

POWER lamp flashes.

The pump can be started or stopped by holding down
the START/STOP button.

REMOTE
RS-232C
RS-485

POWER lamp lights up. The pump can be started or stopped via a remote control

connector, serial connector (RS-232C, RS-485).
When using serial communication, the pump can be
started or stopped by sending an online request
command via the corresponding communication
specification.
To return from a communication mode to the REMOTE
mode, send an offline request command via the
corresponding communication specification.

(1) LOCAL mode

Hold down

(3) RS-232C mode

(4) RS-485 mode

Online command
/ Offline command

(When the POWER switch is turned on, or when recovering from power failure)

Energization

(2) REMOTE mode

the RESET button

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Содержание UTM1200 Series

Страница 1: ...ies YK17 0012 101 00 263 43467 INSTRUCTION MANUAL Turbo Molecular Pump ULVAC Inc Components Division http www ulvac co jp Before using this product be sure to read this operation manual Keep this manu...

Страница 2: ...This page is intentionally left blank...

Страница 3: ...ucing or copying part or all of this document without permission from ULVAC An original language of this manual is English The manuals of the same model described in other languages are the translatio...

Страница 4: ...proper or cause injury by electrical shock WARNING Decisions on system compatibility should be made by the system designer or the person deciding the specifications after conducting tests as necessar...

Страница 5: ...p is installed to host equipment WARNING Do not remove or do maintenance the turbo molecular pump before safety has been confirmed Improper turbo molecular pump use may be hazardous to operator s heal...

Страница 6: ...may result in damaging the vacuum vessel interior and other units causing pressure fluctuation by stopping the pump and dispersal of parts CAUTION Avoid to install the pump at the following places 1...

Страница 7: ...PE Protective Earth connection to the chassis of pump in final application CAUTION When pump is removed from a equipment drain the water from water pipe during pump power on and water valve open If r...

Страница 8: ...mponents 6 Be sure to use the chemical type pumps to exhaust of gas which contain chlorine or fluorine 7 When using the variable speed function to change the pump rotation rate use a rotation rate tha...

Страница 9: ...for 5 gauss lines 3 Remove Label Do not remove cover or else it may cause some changes inside and it is failed 4 Cable Label Be sure to use specified cable for this power supply If not it may cause co...

Страница 10: ...viii Location of Label...

Страница 11: ...ection 1 OUTLINE AND DESCRIPTIONS 1 1 Outline 2 1 2 Descriptions 3 1 2 1 Outside Drawing of Pump Main Unit 3 1 2 1 1 UTM1600 Series Outside Drawing 3 1 2 1 2 UTM1200 Series Outside Drawing 4 1 2 2 Pow...

Страница 12: ...5 1 Installation 26 5 1 1 Pump Mounting Direction 26 5 1 2 Installation of the Pump 27 5 1 2 1 Instruction and Lifting Method 29 5 1 2 2 Installation of UTM1600 Series 30 5 1 2 3 Installation of UTM1...

Страница 13: ...48 6 5 Variable Speed Operation 50 6 5 1 Outline 50 6 5 2 Operation from Start up to Low Speed Rotation 51 6 5 2 1 REMOTE Operation 51 6 5 2 2 Serial Interface Operation 51 6 5 3 Operation from Rated...

Страница 14: ...on 9 TROUBLESHOOTING 9 1 Vacuum Pressure Rise 76 9 2 Abnormal Noise and or Vibration 76 9 3 Nothing Happens After an Operation is Made 77 9 4 Power Failures 78 9 4 1 Power Failure Counter operation 79...

Страница 15: ...S 1 1 Outline 1 2 Descriptions 1 2 1 Outside Drawing of Pump Main Unit 1 2 1 1 UTM1600 Series Outside Drawing 1 2 1 2 UTM1200 Series Outside Drawing 1 2 2 Power Cable 1 2 3 Standard Accessories 1 2 4...

Страница 16: ...ng vacuum pump to create a high vacuum in a vacuum chamber Typical Applications Semiconductor equipments Industrial equipments R D applications The other ultra high vacuum applications The turbo molec...

Страница 17: ...utside Drawing Fig 1 1 UTM1600 Series Description Inlet flange A B C n d E F G UTM1600A MI AVWX VG200 374 229 263 5 8 13 300 270 299 UTM1600A MI AWWX VG250 374 229 263 5 12 13 350 320 299 UTM1600A MI...

Страница 18: ...PTIONS 4 1 1 2 1 2 UTM1200 Series Outside Drawing Fig 1 2 UTM1200 Series Description Inlet flange A B C n d E F G UTM1200A MI AVWX VG150 439 294 328 5 8 11 235 210 364 UTM1200A MI AFWX ISO160F 441 5 2...

Страница 19: ...00F Not included ISO250F Not included 3 Dust cap outlet flange 1 KF40 4 SERIAL CONNECTOR ASSY X05 1 Connector and contact Refer to Fig 6 8 5 REMOTE CONNECTOR X05 NWP 1 Connector for remote control non...

Страница 20: ...1600 4300 series Booklet English Joint Orifice size Description 1 KF10 Clamp Centering with O ring 0 5 mm GP ADAPTOR 0 5 1303 KF 2 KF10 Dust cap 0 5 mm GP ADAPTOR 0 5 1303 KF CAP 3 UJR 6 35 Male 0 5 m...

Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 AC INPUT Panel 2 3 Local Control Panel 2 4 External I F Panel...

Страница 22: ...Section 7 GAS PURGE 3 OUTLET FLANGE Outlet flange connect a backing vacuum pump or its related pipe connection KF40 4 COOLING WATER PIPELINE Cooling water pipe connector Rc1 4 5 AC INPUT PANEL AC inp...

Страница 23: ...2 2 2 AC INPUT Panel Fig 2 2 Outline View of AC INPUT Panel 1 AC INPUT connecter Power cable receptacle 2 POWER switch Power switch 3 VALVE connector Water valve connector Refer to Section 5 3 Prepar...

Страница 24: ...button By maintained push about 2 seconds REMOTE MODE and LOCAL MODE are changed 3 POWER lamp green This lamp lights or blinks while power on lights REMOTE mode blinks LOCAL mode 4 NORMAL lamp green...

Страница 25: ...xternal I F Panel 1 REMOTE connector Connector for remote control Refer to Section 6 7 Remote control Connector 2 SERIAL connector Connector for RS 232C or RS 485 communication Refer to Section 6 8 Co...

Страница 26: ...12 2 2 4 External I F Panel This page is intentionally left blank...

Страница 27: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...

Страница 28: ...ate a disk attached to the drive shaft between the axial magnetic bearings Each magnetic bearing is provided with a gap sensor 9 to detect the rotor position Fig 3 2 illustrates the outline of 5 axes...

Страница 29: ...onal Drawing 1 High frequency motor 6 Radial magnetic bearing 11 Outlet flange 2 Drive shaft 7 Axial magnetic bearing 12 Protective net 3 Rotor blade 8 Touch down bearing 13 Cooling water pipeline 4 S...

Страница 30: ...lar pump by controlling the following 5 degrees of freedom excluding the rotational degree Z axis of freedom Fig 3 2 Outline of 5 Axes Control X Y Z rotational axis Parallel movement X Y Y Radial disp...

Страница 31: ...ply to direct current then uses a three phase inverter to control AC frequency If a power interruption occurs when the rotor is rotating at high speed the power supply unit uses the motor as a generat...

Страница 32: ...18 3 3 3 Controller This page is intentionally left blank...

Страница 33: ...4 4SPECIFICATIONS 4 1 Standard Specifications for Pump Unit 4 2 The Maximum Allowable Gas Throughput 4 3 Environmental Conditions 4 4 Standards Fulfilled...

Страница 34: ...nting position In any desired direction Note 4 Vibration level by ULVAC s method 0 01 m or less 0 peak Noise 57 dB A or less 37200 rpm Recommended flow rate of purge gas 30 mL min Note 5 Admissible pu...

Страница 35: ...rning Failure of magnetic bearing Dew condensation Refer to Section 5 3 Protection Alarm Alarm lamp illuminates Power Interruption Alarm Decelerated while maintaining levitation using regenerative pow...

Страница 36: ...flow rate Note 4 With back pump whose pumping speed is 10000 L min and piping KF40 1 5 m length 4 3 Environmental Conditions Gas type Note 1 Temperature of a flange connecting to pump inlet flange Ga...

Страница 37: ...4 4 Standards Fulfilled 23 4 4 4 Standards Fulfilled Safety EN 61010 1 UL 61010 1 EN 1012 2 EMC EN 61326 1 Class A EN 61000 3 2 Class A EN 61000 6 2...

Страница 38: ...24 4 4 4 Standards Fulfilled This page is intentionally left blank...

Страница 39: ...ting Method 5 1 2 2 Installation of UTM1600 Series 5 1 2 3 Installation of UTM1200 Series 5 1 3 Example of Piping Connection 5 1 3 1 Connection of Exhaust Line 5 1 3 2 Connection of Cooling Water Line...

Страница 40: ...zontal inverted or oblique position The outlet port of the turbo molecular pump should face horizontally or vertically when installing the pump horizontally and obliquely When an installation directio...

Страница 41: ...in strength in preparation for an emergency accident WARNING Ensure that no oil mist or hazardous substances are present in process line as safe ducting procedure when turbo molecular pump is installe...

Страница 42: ...r the pump inlet or outlet without fail CAUTION The center of gravity of the pump is indicated in Fig 5 3 Be sure that the pump does not move or fall down during installation or storage CAUTION This p...

Страница 43: ...pump is shown in Fig 5 3 Fix securely to avoid moving or falling down in the event of an earthquake Fig 5 3 Center of Gravity of the Pump Position Inlet flange Eyebolt size Number of eyebolts Remark...

Страница 44: ...he inlet flange of the pump Make installation with the cylindrical part of the bolt not thread part fit in the mating section of flanges When you connect piping or valve between the chamber and the pu...

Страница 45: ...uantity M12 12 PC M10 12 PC Material Stainless steel Grade A2 70 JIS B 1054 ISO 3506 Washer Plain washer and spring lock washer Bolt Nut Half thread All thread Tap Fixing method Only by the inlet flan...

Страница 46: ...he inlet flange of the pump Make installation with the cylindrical part of the bolt not thread part fit in the mating section of flanges When you connect piping or valve between the chamber and the pu...

Страница 47: ...he Fixing Bolt Bolt Nut Half thread All thread Tap Fixing method Only by the inlet flange Inlet flange VG150 ISO160F Bolt size Quantity M10 8 PC Material Alloyed steel standardized in AMS6419 Grade Te...

Страница 48: ...n flange to the outlet flange of the pump Refer to Fig 5 8 marks are not attached to this turbo molecular pump set Fig 5 8 Example of Exhaust Line After complete piping connection check for perfect ai...

Страница 49: ...own in Fig 5 9 The valve to isolate Lockout Tagout cooling water should be installed at user equipment Fig 5 9 Connector of Cooling Water Line 2 When connecting the cooling water pipes screw the pipe...

Страница 50: ...reached and it should be marked as the disconnecting device for the equipment Check that the part number stuck on the cable is same as the part number shown in Section 1 2 2 Power Cable If using conne...

Страница 51: ...7 5 REFERENCE For the specified power voltage refer to the side panel of the power supply unit Fig 5 12 Power Cable Table 5 6 Power Cable CONNECTION Wire color of power cable Green Yellow Black White...

Страница 52: ...condition shown in Fig 5 13 Ex When the ambient temperature is 30 degrees C and the relative humidity is 70 the cooling water temperature should be 24 degrees C or more Note 2 Please do not install a...

Страница 53: ...he turbo molecular pump and the vacuum chamber close this valve too 4 Provide a flowmeter on the downstream of cooling water line otherwise the turbo molecular pump will shut down and otherwise set up...

Страница 54: ...40 5 5 5 Notes on Transportation This page is intentionally left blank...

Страница 55: ...ting Down 6 4 1 Preparations Prior to Shutting Down Operation 6 4 2 Shutting Down Sequence in LOCAL Mode 6 4 3 Shutting Down Sequence in REMOTE control Connector 6 4 4 Shutting Down Sequence in Other...

Страница 56: ...ump cannot be started stopped using two or more of these ways at the same time Determination of which start stop instruction to be followed depends on the operation mode selected There are five operat...

Страница 57: ...nector serial connector RS 232C RS 485 When using serial communication the pump can be started or stopped by sending an online request command via the corresponding communication specification To retu...

Страница 58: ...sh the RESET button Fig 2 3 2 to change from REMOTE mode to LOCAL mode The POWER lamp blinks when becoming a LOCAL mode 3 Evacuate the turbo molecular pump by using a backing vacuum pump 4 Start up pr...

Страница 59: ...lamp Under this condition the rotor of the turbo molecular pump is levitated by the magnetic bearing 3 Online command is demanded from the communication means and confirm the mode was switched to the...

Страница 60: ...p starts to accelerate and after a few seconds the ROTATION signal turns on In this product of a standard spec ACCELERATION signal Refer to Table 6 4 from the remote control connector turns on when th...

Страница 61: ...mp does not exceed 20 kPa GAUGE CAUTION Electrical energy isolation Lockout Tagout should be achieved by opening the main disconnect device or circuit breaker of host equipment thereby removing power...

Страница 62: ...y unplug AC INPUT connector 6 4 4 Shutting Down Sequence in Other Communication Means 1 Input the STOP command via the communication means The pump deceleration starts Status is changed from NORMAL or...

Страница 63: ...NORMAL lamp goes out ROTATION signal Refer to Table 6 4 turns off or change to stop status when the pump rotational speed is 60 rpm or less Turning off the POWER switch permits the pump rotor to be s...

Страница 64: ...6 4 3 The NORMAL mode or LOW SPEED mode selection can be made before or after start up 4 Set the low speed value between 25 and 100 of the rated speed in 0 1 increments using the serial communications...

Страница 65: ...arts to accelerate 6 When the rotational speed reaches 80 of low speed value the NORMAL signal turns on In this product of a standard spec the remote control connector ACCELERATION signal turns off 7...

Страница 66: ...p The BRAKE signal ON Refer to Table 6 4 in this product of a standard spec 4 Once rotation reaches the low speed rotation speed the NORMAL signal ON In this product of a standard spec the BRAKE signa...

Страница 67: ...this product of a standard spec 4 If the set low speed value exceed 80 rated speed remote control signals remain unchanged and the pump accelerates 5 When the rated speed is reached the pump stops ac...

Страница 68: ...ALARM reset Reset operation when alarm occur Timer Run time Timer and Counter Monitoring and reset Maintenance timer Power failure touch down count High speed touch down count MB warning count Setting...

Страница 69: ...run status STATUS Descripition NORMAL ACCELERATION BRAKE STOP E STOP E BRAKE E IDLE Rotating at rated rotation speed Accelerating Decelerating Stopped Alarm is active stopped Alarm is active decelera...

Страница 70: ...nector Fig 6 3 Remote control Circuit Connection method By momentary type START STOP switch By alternate type switch Wiring connection Control Pump start by short circuiting 1 and 16 Pump stop by open...

Страница 71: ...Note 3 Contact Input STOP 2 Pump stop by opening GND and pin No 2 Note 3 Note 5 RESET Note 4 14 Resetting operation on short circuiting between GND and pin No 14 LOW SPEED 15 Variable speed operation...

Страница 72: ...e 1 Alarm occurred Open Close Power OFF and no alarm Close Open SEMI E74 Note 2 Power OFF and active alarm Close Open No alarm Open Close WARNING 13 25 12 25 EI 03 Note 1 Warning occurred Open Close P...

Страница 73: ...used For connection with this connector the communication cable with shield is necessary The shield of the cable should be connected to case Interface RS 232C Synchronous system Asynchronous Transmis...

Страница 74: ...6 OPERATION 60 6 3 Cable length Connection cables can be extended up to 15 meters but may be subjects to errors depending on actual operational environment Fig 6 5 Example of RS 232C Cable Wiring Conn...

Страница 75: ...i drop function OFF Interface RS 485 2 wire Synchronous system Asynchronous Transmission rate 9600 bps fixed Character configuration Start bit 1 Data bits 8 Parity None Stop bit 1 Flow control None Nu...

Страница 76: ...rminator A terminator 120 1 4 W min is required for connection Terminators are not necessary for multidropped turbo molecular pump with another pump or pump to which the computer connects is connected...

Страница 77: ...nector Fig 6 8 Serial Connector and Pin Configuration NOTICE Serial communication specifications conform to RS 232C and RS 485 These interfaces were tested on a typical condition but the normal commun...

Страница 78: ...64 6 6 8 Communication Specifications This page is intentionally left blank...

Страница 79: ...7 7GAS PURGE...

Страница 80: ...urging Method adaptor with 0 5 mm orifice Table 7 1 Table of Gas Purge Adaptor Start Gas Supply After starting backing vacuum pump but before exhausting process gas Stop Gas Supply After thoroughly ex...

Страница 81: ...ITION 8 1 Recommended Maintenance Intervals 8 2 Turbo Molecular Pump Decontamination 8 3 Touch down Bearing Replacement 8 4 Check of the Rotor Blades 8 5 Power Supply Unit Parts Replacement 8 6 Turbo...

Страница 82: ...mmended maintenance intervals for other parts 1 It has the possibility that the following part is exchanged when cleaning TMP 2 Others When exchanging parts it has possibility that other parts are exc...

Страница 83: ...r rotational resistance and require replacement of touch down bearings The replacement of the touch down bearing is done only by ULVAC or an approved service company 8 4 Check of the Rotor Blades Roto...

Страница 84: ...Doing so may prevent obtaining the maximum performance To obtain ensure the pump and power supply unit operate safely and perform as designed have parts that exceed their expected service life be rep...

Страница 85: ...e performed by ULVAC or an approved service company A copy of this from is printed at the end of this manuals Repair of the turbo molecular pump The following precautions are required before forwardin...

Страница 86: ...installation Need 2 or more eyebolts as described in Fig 8 1 when lifting this pump on vertical position Need 4 eyebolts as described in Fig 8 1 when lifting this pump on inverted position There is a...

Страница 87: ...ure and humidity environment etc from the outside Please use the packing materials which were used at shipment from ULVAC or use the packing materials having a same quality or better Position Inlet fl...

Страница 88: ...74 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...

Страница 89: ...ration 9 3 Nothing Happens After an Operation is Made 9 4 Power Failures 9 4 1 Power Failure Counter operation 9 5 Alarm Detection Capabilities 9 5 1 Movement in Alarm Detection Capabilities ALARM 9 5...

Страница 90: ...or vibration the turbo molecular pump operation is to be stopped immediately But there is possible that a race of touch down bearing Fig 3 1 8 may make sounds for seconds when the pump internal pressu...

Страница 91: ...L mode POWER lamp blinks 6 2 Other causes Check the Alarm lamp is not lights in orange If an alarm is indicated correct the malfunction and reset alarm 9 5 3 Remote STOP signal active but the turbo mo...

Страница 92: ...ing Table 9 2 shows the number of revolutions and period of time that will elapse before being supported by the touch down bearing when the power fails at the rated speed Table 9 2 Time and Rotational...

Страница 93: ...ator lamp NORMAL Before power failure indication goes on Before power failure indication goes on Before power failure indication goes on Before power failure indication goes on Alarm Before power fail...

Страница 94: ...pump start the protective operations shown in Table 9 6 Table of Alarms 4 The detection error is recorded in the error log 9 5 2 Movement in Alarm Detection Capabilities WARNING 1 Alarm lamp Fig 2 3 5...

Страница 95: ...k that too much purge gas is not flowing Check that process gas flow rate is not too high 4 1 4 19 EI FAILURE Power supply unit can not identify the pump correctly Consult your ULVAC representative 5...

Страница 96: ...d inlet pressures are not too high Check for leakage Check that too much purge gas is not flowing 6 2 14 49 TMP CAN NOT START Pump does not rotate Adhesion of reaction products or damage to the protec...

Страница 97: ...ent strong external shock or vibrations Continuous operation is possible However if the shock or vibrations occur frequently stop the pump and remove the source of the shock or vibrations or re examin...

Страница 98: ...e control system 32 EI DC DC OVERTEMP Increased temperature inside control system Free run motor stop 34 EI INV OVERCURR Overcurrent ran through the motor 35 EI INV OVERVOLT Defective circuit 36 EI DC...

Страница 99: ...ON1 Y2 60 MB VIBRATION1 Z 61 MB SENSOR ERR X1 Abnormal output signal from the magnetic bearing sensor 62 MB SENSOR ERR Y1 63 MB SENSOR ERR X2 64 MB SENSOR ERR Y2 65 MB SENSOR ERR Z 66 MB DSP ERROR Err...

Страница 100: ...s possible detected during power supply self diagnostics 82 MB SELFCHECK Y1 83 MB SELFCHECK X2 84 MB SELFCHECK Y2 85 MB SELFCHECK Z 86 MB VIB WARN X1 Vibrations of the magnetic bearing become temporar...

Страница 101: ...10 10WARRANTY CLAUSES...

Страница 102: ...service conditions described in this document such as temperature range and power etc b Direct export transaction Product which has damage caused by a failure on delivery In the case of direct export...

Страница 103: ...he reason of failure was improper use which does not conform to the use condition of this Product j Consumable parts k The SECURITY seal certificates that the product was made or maintenanced by ULVAC...

Страница 104: ...90 10 This page is intentionally left blank...

Страница 105: ...er 8 35 E External I F panel 8 I inlet flange 8 15 L Local control panel 8 N noise 20 NORMAL lamp 10 O outlet flange 8 15 P POWER lamp 10 POWER switch 9 Protective 15 R REMOTE connector 11 RESET butto...

Страница 106: ...Index Index 2 This page is intentionally left blank...

Страница 107: ...ontaminated with reactive products or substances produced by reaction Product model Model Serial No Application Remarks Contaminant Check an applicable box I guarantee that above returned item s is no...

Страница 108: ...c http www ulvac co jp en Service Centers http www ulvac co jp en support service center Sales O ces http www ulvac co jp en support sales o ces TEL 0467 89 2261 TEL 03 5769 5511 TEL 06 6397 2286 ULVA...

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