Table of contents
xi
6.2 Startup Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
6.2.1
Start-up Preparation Sequence in LOCAL Mode . . . . . . . . . . . . . . . . 44
6.2.2
Start-up Preparation Sequence in REMOTE-control Connector. . . . . 44
6.2.3
Start-up Preparation Sequence in Other Communication Means. . . . 45
6.3 Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
6.3.1
Start-up Sequence in LOCAL Mode . . . . . . . . . . . . . . . . . . . . . . . . . . 46
6.3.2
Start-up Sequence in REMOTE-control Connector . . . . . . . . . . . . . . 46
6.3.3
Start-up Sequence in Other Communication Means . . . . . . . . . . . . . 46
6.4 Shutting Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
6.4.1
Preparations Prior to Shutting Down Operation . . . . . . . . . . . . . . . . . 47
6.4.2
Shutting Down Sequence in LOCAL Mode. . . . . . . . . . . . . . . . . . . . . 48
6.4.3
Shutting Down Sequence in REMOTE-control Connector . . . . . . . . . 48
6.4.4
Shutting Down Sequence in Other Communication Means . . . . . . . . 48
6.5 Variable Speed Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
6.5.1
Outline. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
6.5.2
Operation from Start-up to Low Speed Rotation. . . . . . . . . . . . . . . . . 51
6.5.2.1
REMOTE Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
6.5.2.2
Serial Interface Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
6.5.3
Operation from Rated Speed Rotation to Low Speed Rotation . . . . . 52
6.5.3.1
Remote Control Startup Procedure . . . . . . . . . . . . . . . . . . . . . . 52
6.5.3.2
Serial Interface Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
6.5.4
Operation from Low Speed Rotation to Rated Speed Rotation . . . . . 53
6.5.4.1
REMOTE Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
6.5.4.2
Serial Interface Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
6.6 Software Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
6.7 Remote-control Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . 56
6.7.1
Specification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
6.7.2
Pin Assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
6.7.3
Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
6.8 Communication Specifications. . . . . . . . . . . . . . . . . . . . . . . . 59
6.8.1
RS-232C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
6.8.1.1
Transfer Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
6.8.1.2
Connector Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
6.8.1.3
CABLE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
6.8.2
RS-485 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
6.8.2.1
Transfer Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
6.8.2.2
Connector Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
6.8.2.3
CABLE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
6.8.3
Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
Содержание UTM1200 Series
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Страница 27: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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