SECTION 5
INSTALLATION
38
5
5.3
Preparation for Operation
(1) This product is a water cooled model. Always provide a flow of coolant water that meets
the indicated specifications.
(2) Make sure no water is leaking from the coolant lines. Do not spill coolant on the pump.
(3) Make sure that there is no dew condensation and not high humidity environment at the
location indicated in Fig. 5-14.
(4) Make sure that the water valve cable is connected to the VALVE connector.
(Note 1) Use this pump in adapted condition shown in Fig. 5-13.
Ex : When the ambient temperature is 30 degrees C. and the relative humidity is
70 %, the cooling water temperature should be 24 degrees C. or more.
(Note 2) Please do not install a pump in the dew condensation environment.
Do not turn on the power when the place shown in Fig. 5-14 has dew condensations.
Stop pump operation immediately and turn off the power, when you find the dew
condensations while pump is running.
Ever if the power supply unit is OFF, do not flow coolant through it that is below dew
point.
Fig. 5-13
Environmental Condition
(relationship between ambient temp, relative humidity and cooling water temperature)
Fig. 5-14
Locations to Check for Dew Condensation
Содержание UTM1200 Series
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Страница 27: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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