Ulvac UTM1200 Series, Инструкция по эксплуатации

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SECTION 9 TROUBLESHOOTING
80
9
9.5
Alarm Detection Capabilities
NOTICE
Alarm history data can be read via serial interface, but cannot be read via remote control
connector.
The fault detection functions shown in Table 9-6 "Table of Alarms" and Table 9-7 "Table of
Warnings" are incorporated for protection in the event of a problem with the turbo molecular
pump or power supply unit.
When an error is detected, check the Alarm lamp (Fig. 2-3 (5)) and Refer to Section 9.5.3
"Reset Procedure" for the appropriate remedy.
9.5.1 Movement in Alarm Detection Capabilities (ALARM)
1. Alarm lamp (Fig. 2-3 (5)) lights.
2. The remote-control connector "ALARM" signal turn on.
3. The pump start the protective operations shown in Table 9-6 "Table of Alarms".
4. The detection error is recorded in the error log.
9.5.2 Movement in Alarm Detection Capabilities (WARNING)
1. Alarm lamp (Fig. 2-3 (5)) flashes.
2. The remote-control connector "WARNING" signal turn on.
3. Pump operation continues.
4. The detection error is recorded in the error log.
9.5.3 Reset Procedure
1. Refer to the Troubleshooting information and eliminate the cause of the problem.
2. Conduct the reset operation.
3. (ALARM) If the problem has been eliminated, the Alarm lamp (Fig. 2-3 (5)) goes out, the
"ALARM" remote-control signals (Refer to Table 6-4) turn off after an alarm was given, the
pump rotor decelerates rotational speed.
(WARNING) When the problem is eliminated after a warning occurred, pump operation
continues.
4. If the problem was not completely eliminated, the alarm is not cancelled.