Ulvac UTM1200 Series, Инструкция по эксплуатации

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SECTION 3 CONSTRUCTION AND PRINCIPLE
16
3
The movement of an object has 6 degrees of freedom. Levitation can be achieved in a turbo
molecular pump by controlling the following 5 degrees of freedom (excluding the rotational
degree (Z axis) of freedom).
Fig.3-2 Outline of 5-Axes Control
X
Y
Z
rotational axis
Parallel movement
X Y Y
Radial displacement Axial displacement
Z
X
Z
Y
Movement of rotor and restricted five degrees of freedom
Rotation
Z Z Z
X
2
Z
X
1
Y
1
Y
2
5-axes control
① Ｘ
１
② Ｙ
１
③ Ｘ
２
④ Ｙ
２
⑤ Ｚ