6
6
OPERATION
6.1
Overview
6.1.1
Introduction : Operation Modes
6.2
Startup Preparation
6.2.1
Start-up Preparation Sequence in LOCAL Mode
6.2.2
Start-up Preparation Sequence in REMOTE-control Connector
6.2.3
Start-up Preparation Sequence in Other Communication Means
6.3
Start-up
6.3.1
Start-up Sequence in LOCAL Mode
6.3.2
Start-up Sequence in REMOTE-control Connector
6.3.3
Start-up Sequence in Other Communication Means
6.4
Shutting Down
6.4.1
Preparations Prior to Shutting Down Operation
6.4.2
Shutting Down Sequence in LOCAL Mode
6.4.3
Shutting Down Sequence in REMOTE-control Connector
6.4.4
Shutting Down Sequence in Other Communication Means
6.5
Variable Speed Operation
6.5.1
Outline
6.5.2
Operation from Start-up to Low Speed Rotation
6.5.3
Operation from Rated Speed Rotation to Low Speed Rotation
6.5.4
Operation from Low Speed Rotation to Rated Speed Rotation
6.6
Software Operation
6.7
Remote-control Connector
6.7.1
Specification
6.7.2
Pin Assignment
6.7.3
Connector
6.8
Communication Specifications
6.8.1
RS-232C
6.8.2
RS-485
6.8.3
Connector
Содержание UTM1200 Series
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Страница 27: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
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