Ulvac RFP-N, Инструкция по эксплуатации

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RF POWER SUPPLY and MATCHINGBOX 4. Functions
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L H T = 9 9 % L H M = 9 9 % T 5 0 %
L L T = 0 % L L M = 0 % M 5 0 %
P T = 5 0 % P M = 5 0 % M P S
P S C N T = 0 0 0 0 0 0 0 0 P R G 0
Figure 4-17 Variable capacitor limit configuration screen (P3)
Item Parameter details
LHT Sets the TUNE variable capacitor upper limit.
LHM Sets the MATCH variable capacitor upper limit.
LLT Sets the TUNE variable capacitor lower limit.
LLM Sets the MATCH variable capacitor lower limit.
PT Sets the TUNE variable capacitor preset point.
PM Sets the MATCH variable capacitor preset point.
MPS
Performs a manual preset.Press the "ENT" button to perform the preset
operation when the setting is ON.
PSCNT Displays the number of presets.
PRG Sets the program number.
T Displays the current position of the TUNE variable capacitor.
M Displays the current position of the MATCH variable capacitor.
T L I F E = 0 k W h r
R F O N = 0 H r
M A I N T E
Figure 4-18 Target life screen (P4)
Item Parameter details
TLIFE
Displays the accumulated output power.
Use this for the target replacement cycle.
RFON Displays the accumulated RF on time.
MAINTE Displayed when in maintenance mode.