Ulvac RFP-N, Инструкция по эксплуатации, Страница: 69 / 107

RF POWER SUPPLY and MATCHINGBOX 4. Functions
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Select matching mode AMOP_XXXX[CR]
Select PANEL: AMOP_ PANEL[CR]
Select ANALOG: AMOP_ANALOG [CR]
Select SELECT: AMOP_ SELECT [CR]
Response when command accepted: [CR]
Response when command not accepted: N[CR]
Select RF Generator operating
method
RFOP_XXXX[CR]
Select PANEL: RFOP_ PANEL[CR]
Select ANALOG: RFOP_ANALOG [CR]
Select EXT.ON: RFOP_EXT.ON [CR]
Response when command accepted: [CR]
Response when command not accepted: N[CR]
PRESET TUNE PT_XX[CR]
Specified in a range between 0 and 99.
Response when command accepted: [CR]
Response when command not accepted: N[CR]
PRESET MATCH PM_XX[CR]
Specified in a range between 0 and 99.
Response when command accepted: [CR]
Response when command not accepted: N[CR]
PROGRAM PRESET MPS_ON[CR]
Move to the PRESET position with the selection program
number.
Response when command accepted: [CR]
Response when command not accepted: N[CR]
Check arc detection count ACNT? [CR]
Returns the arc detection count during the previous RF-ON.
Response when command accepted: XX[CR]
(zero suppressed)
Response when command not accepted: N[CR]
Check total arc detection count ACNTSUM? [CR]
Returns the arc detection count up to the present.
Response when command accepted: XX[CR]
(zero suppressed)
Response when command not accepted: N[CR]
* "_" in the command indicates a space (0x20).
* "[CR]" in the command indicates a return (0x0D).
*Secure an interval of 100msec or more between each command transmission. Sending at intervals of
100msec or less may result in incorrect transmission/reception.