Ulvac RFP-N, Инструкция по эксплуатации, Страница: 4 / 107

RF POWER SUPPLY and MATCHINGBOX Introduction
iii
2. Safety symbols
This symbol indicates the possibility of impending death or
serious injury when the hazard cannot be avoided.
Work that ignores this warning has a high probability of severely
injuring people or damaging factory equipment (including the
system).
This symbol indicates the possibility of death or serious
personal injury when the hazard cannot be avoided.
Work that ignores this warning can severely injure people or
damage factory equipment (including the system).
This symbol indicates the possibility of minor injury or
moderate damage to the system when the hazard cannot be
avoided.
Work that ignores this warning carries the risk of minor injury to
the operator, damage to the system, or the system may require
adjustment.
There is no direct danger, but this symbol notes content you
should understand to work safely and to use the system correctly.

It is not possible to precisely anticipate all potential dangers in operation, inspection, or
maintenance in all operating environments.

The warnings listed in this manual and on the warning labels affixed to the system do not satisfy
every aspect of safety.

Workers performing maintenance on the system should pay the utmost care and work to maintain
safety so that serious accidents including injury or damage to the system do not occur.

When operating, inspecting, or maintaining the system in a manner not described in this manual,
all workers must perform that work at their own responsibility paying careful attention to the
necessary safety precautions.
Danger
Warning
Caution
Note