Ulvac RFP-N, Инструкция по эксплуатации

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RF POWER SUPPLY and MATCHINGBOX 3. Setup
30
Danger
In order to prevent electric shock accidents, work in the following manner.
Always turn off your primary main breaker when wiring the input RF Generator. First
complete the GND wiring, then start work on the other wiring. Connect the included
input cable connector to the RF generator first, and then wire it to the opposite side.
When disconnecting the wiring, disconnect the GND wiring last.
* When using multiple single-phase 200 V devices with a three-phase 200 VAC power supply, use
caution to ensure the three-phase power does not become unbalanced.
3-4-3. Connecting the earth terminal
Danger
High voltages (several kilovolts) are generated by resonance in the matching box.
There is a risk of electric shock if the system is not properly ground. Always ground the
system. Wire the ground so that the matching box's ground resistance is 10 Ω or less.
According to Japanese standards, Class A grounding in Article 18 of the Electrical
Equipment Standards is applicable. Wire the RF Generator's earth (E) terminal for Class
D grounding (Class A grounding when output is 5.0 kW or higher).
Caution
When connecting the coaxial cable, always check first that the power to the RF
Generator is turned off.
Figure 3-7 Power supply input terminal wiring
RF power supply
A
B
C
Single-phase
200 V
Black_1 (L1)
Black_2 (L2)
FG
Black_3 (L3)
Three-phase
200 V
D
Yellow/green (FG)