Ulvac RFP-N, Инструкция по эксплуатации

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RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment
80
6-3-2. MBX-1330N derating reference values
Table 6-15 MBX-1330N - 1 tap
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 3000 3000 3000 3000 3000 3000 3000 3000 2940 2100 1560
90% 3000 3000 3000 3000 3000 3000 3000 3000 2940 2100 1560
80% 3000 3000 3000 3000 3000 3000 3000 3000 2940 2100 1560
70% 3000 3000 3000 3000 3000 3000 3000 3000 2940 2100 1560
60% 3000 3000 3000 3000 3000 3000 3000 3000 2940 2100 1560
50% 3000 3000 3000 3000 3000 3000 3000 3000 2820 2100 1560
40% 3000 3000 3000 3000 3000 3000 3000 2550 1980 1560 1260
30% 3000 3000 3000 3000 3000 3000 2280 1710 1320 1050 840
20% 3000 3000 3000 3000 2760 2010 1470 1110 840 660 540
10% 3000 3000 3000 2460 1680 1200 870 660 480 390 300
00% 3000 3000 2010 1290 870 630 450 330 240 180 150
TUNE
M
A
T
CH
MBX-1330N-(1T)
Table 6-16 MBX-1330N - 2 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 3000 3000 3000 3000 3000 3000 3000 3000 2700 1920 1410
90% 3000 3000 3000 3000 3000 3000 3000 3000 2700 1920 1410
80% 3000 3000 3000 3000 3000 3000 3000 3000 2700 1920 1410
70% 3000 3000 3000 3000 3000 3000 3000 3000 2700 1920 1410
60% 3000 3000 3000 3000 3000 3000 3000 3000 2700 1920 1410
50% 3000 3000 3000 3000 3000 3000 3000 3000 2700 1920 1410
40% 3000 3000 3000 3000 3000 3000 3000 3000 2700 1920 1410
30% 3000 3000 3000 3000 3000 3000 3000 2730 2130 1680 1380
20% 3000 3000 3000 3000 3000 2790 2070 1560 1200 930 750
10% 3000 3000 3000 3000 2130 1530 1110 840 630 480 390
00% 3000 3000 2370 1530 1020 720 510 390 300 210 180
TUNE
M
A
T
CH
MBX-1330N-(2T)
Table 6-17 MBX-1330N - 3 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 3000 3000 3000 3000 3000 3000 3000 3000 2490 1740 1260
90% 3000 3000 3000 3000 3000 3000 3000 3000 2490 1740 1260
80% 3000 3000 3000 3000 3000 3000 3000 3000 2490 1740 1260
70% 3000 3000 3000 3000 3000 3000 3000 3000 2490 1740 1260
60% 3000 3000 3000 3000 3000 3000 3000 3000 2490 1740 1260
50% 3000 3000 3000 3000 3000 3000 3000 3000 2490 1740 1260
40% 3000 3000 3000 3000 3000 3000 3000 3000 2490 1740 1260
30% 3000 3000 3000 3000 3000 3000 3000 3000 2490 1740 1260
20% 3000 3000 3000 3000 3000 3000 3000 2910 2130 1590 1260
10% 3000 3000 3000 3000 3000 2460 1800 1350 1050 810 660
00% 3000 3000 3000 2040 1380 960 690 510 390 300 240
TUNE
M
A
T
CH
MBX-1330N-(3T)
Table 6-18 MBX-1330N - 4 taps
00% 10% 20% 30% 40% 50% 60% 70% 80% 90% 99%
99% 3000 3000 3000 3000 3000 3000 3000 3000 2340 1620 1140
90% 3000 3000 3000 3000 3000 3000 3000 3000 2340 1620 1140
80% 3000 3000 3000 3000 3000 3000 3000 3000 2340 1620 1140
70% 3000 3000 3000 3000 3000 3000 3000 3000 2340 1620 1140
60% 3000 3000 3000 3000 3000 3000 3000 3000 2340 1620 1140
50% 3000 3000 3000 3000 3000 3000 3000 3000 2340 1620 1140
40% 3000 3000 3000 3000 3000 3000 3000 3000 2340 1620 1140
30% 3000 3000 3000 3000 3000 3000 3000 3000 2340 1620 1140
20% 3000 3000 3000 3000 3000 3000 3000 2880 2100 1620 1140
10% 3000 3000 3000 3000 3000 3000 2490 1770 1320 990 810
00% 3000 3000 3000 3000 2070 1470 1050 780 600 480 390
TUNE
M
A
T
CH
MBX-1330N-(4T)