Ulvac GLD-137CC, Инструкция по эксплуатации

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0. Introduction
0.1 Before using the vacuum pump
Thank you for purchasing our vacuum pump (hereinafter called “pump”). When you have received
the pump, check that the delivered pump is as per your order and that it has not been damaged in
transportation, etc.
In order to use the pump for as long as possible, read this instruction manual
thoroughly before performing installation, operation, inspection and
maintenance, and sufficiently understand the cautions for safety, the
specifications and operation methods of the pump.
No part of this instruction manual may be copied for use by a third party
without our permission.
Warning
Note