Ulvac GLD-137CC, Инструкция по эксплуатации

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1. For Safe Operation
1.1 Hazards peculiar to the pump and safety measures
Before operating or inspecting the pump, read this section carefully to fully understand potential
hazards and prevention methods.
The pump is not to be used with toxic of flammable gases.
1.1.1 Danger Leakage of hazardous gases and substances
Cause Prevention method and measures
Injury due to touching toxic
pump oil in the pump or
harmful substances attached
to the pump during
inspection or disposal
⇒ ①
Before overhauling and disposing of the pump, ask a
waste disposal specialist to make it safe.
②
Ask an authorized waste disposal specialist to carry out
disposal.
1.1.2 Warning Electric shock
Cause Prevention method and measures
The energized part of the
motor was touched.
⇒ ①
When connecting electric wires, always turn off the
power and be sure to connect the earth wire.
②
When inspecting and transferring the pump, always turn
off the power.
③
Never insert hands, fingers, or thin objects through the
motor opening.
Do not expose any part of the human body to vacuum.
1.1.3 Warning Explosion
Cause Prevention method and measures
The pressure in the pump
increased causing the pump
to explode.
⇒
The maximum internal pump pressure is 0.03 MPa (gauge
pressure).
Measure the pressure at the outlet side and, if the pressure
is 0.03 MPa or more (gauge pressure), remove objects
which block the passage of gas from the outlet side. When
an oil mist trap is adopted, replace or clean it so that it will
not block the passage of gas.
Caution