Ulvac GLD-137CC, Инструкция по эксплуатации

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Problem Cause Measures Reference
⑥
The specified amount of oil has not
been added.
⑥
Add the specified amount of oil. 3.2
⑦
The oil has deteriorated.
⑦
Replace the oil. 6.3
⑧
Leakage occurs from the pipe
connected to the pump.
⑧
Locate the leakage with a leakage
detector and stop the leakage.
⑨
Our specified oil is not being used.
⑨
Overhaul the pump and replace
with oil specified by us
6.3
The pressure
does not
decrease.
⑩
Oil does not circulate, or the oil
hole of the cover is clogged.
⑩
Overhaul and clean the oil hole. 6.2
①
Problem with power supply voltage
①
Set the power supply voltage to
within
±
10% of the rated voltage.
3.6
②
The motor malfunctions.
②
Replace the motor.
③
Foreign matter has entered the
pump.
③
Eliminate the foreign matter and
overhaul the pump.
④
The specified amount of oil has not
been added.
④
Add the specified amount of oil. 3.2
⑤
The coupling spider malfunctions.
⑤
Replace the coupling spider. 6.4
⑥
Oil does not circulate, or the oil
hole of the cover is clogged.
⑥
Overhaul and clean the oil hole. 6.2
Abnormal
sound is
generated.
⑦
Components inside the pump have
burnt out.
⑦
Overhaul (replace the damaged
components).
①
Continuous operation at high
evacuation pressure
①
If continuous operation is
performed at a high evacuation
pressure, the pump surface
temperature increasing 75K.
Under 75K temperature increasing
is not a serious problem.
②
The specified amount of oil has not
been added. (If the oil amount is not
sufficient, the cooling effect of the
pump will be reduced.)
②
Add the specified amount of oil. 3.2
③
The temperature of the evacuated
gas is high.
③
Mount cooling equipment such as a
gas cooler at the inlet side.
Pump surfaces
are extremely
hot
④
Oil does not circulate, or the oil
hole of the cover is clogged.
④
Overhaul and clean the oil hole. 6.2
①
The pump is been filled in excess of
the specified amount.
①
Discharge the oil until it reduces to
the specified amount.
3.2 A lot of oil
splashes out
from the
exhaust port.
②
Continuous operation is performed
at a high evacuation pressure.
②
Install an oil mist trap at the outlet
side.
4.8
The oil leaks
outside the
pump.
①
Deterioration of the O-ring and the
oil seal of the case and cover
①
Check and replace the O-ring and
oil seal.
6.2