Ulvac GLD-137CC, Инструкция по эксплуатации

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The vacuum pump becomes hot (temperature increase under non-load operation:
25K, temperature increase under high-load operation: 75K) during operation.
Do not touch any section other than the valve while the gas ballast valve
is in operation.
When starting operation, be sure to close the gas ballast valve.
If the gas ballast valve is left open without condensable gas being exhausted,
the pump oil scatters, power is lost, or the ultimate pressure increases.
Close the gas ballast valve when condensable gas is not exhausted.
4.8 Installation of the oil mist trap (Option)
An oil mist trap can be installed in order to remove oil mist from the pump. As such an oil mist
trap, models OMT-200A and OMI-200 are available. Remove the standard exhaust port from the
exhaust port of the pump and install an oil mist trap instead. The oil mist trap not only prevents
oil mist generation but also reduces exhaust noise.
For details, refer to the instruction manual for the oil mist trap.
4.9 Restriction on operation when the oil mist trap is installed
When using the oil mist trap, there are some restrictions on operation. When the filter is clogged,
replace it.
The internal pump pressure is limited to 0.03 MPa (gauge pressure). When the pressure
measured at the outlet side has reached 0.03 MPa (gauge pressure), replace the oil mist trap
filter.
Be sure to observe the restrictions on operation when the oil mist trap is
installed. There is a risk of explosion. When the filter is clogged, replace
it.
Caution
Note
Warning