Ulvac GLD-137CC, Инструкция по эксплуатации

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4.2 Start of operation
To start operation, close leak valve (B), open vacuum valve (A) to the inlet port, and turn on the
power switch. Then the pump starts beings to exhaust (see Fig. 5).
① The motor and pump become hot (temperature increase under non-load
operation: 25K, temperature increase under high-load operation: 75K)
during operation of the pump. There is a risk of burns. Never touch the
motor or pump during operation.
② If operation is performed at high pressure, oil mist is generated at the
exhaust side. Install an oil mist trap or connect a duct to discharge the
oil mist outside the room. Or, install a ventilator.
When the pump does not rotate correctly, take the following measures.
① Check the amount of oil, and adjust if necessary.
②
Long term (more than 3 days) If the pump is stopped and placed, there is
a possibility that pump oil intrudes into the cylinder. (It is the same
even if putting the interior of the pump at the atmospheric pressure state
at the time of the previous stop.) When the ambient temperature is low,
when restarting the pump in this state, the thermal protector operates
due to overload You must to do something before you go on.
In such a case,
turn the pump on and off several times in short intervals.
The oil temperature in the pump increases 25 ～ 75K if operation continues
for several hours. If the oil temperature exceeds this range, there is a
possibility of the pump malfunctioning. Check the pump or contact us.
4.3 Stopping the operation
To stop operation, close vacuum valve (A), open leak valve (B) quickly, and turn the power
switch off (see Fig. 5).
Please close a leak valve (B) and seal a suction side as much as possible, after making a suction
side into atmospheric pressure.
Do not stop and restart this equipment repeatedly. When restarting this
equipment, make sure that the pump (motor) has stopped completely before
turning on the power. If the pump (motor) has not stopped completely and the
equipment is restarted, the pump’s (motor) current rises and either the
protection device is activated or the motor may become damaged.
Caution
Note
Note
Caution