Ulvac GLD-137CC, Инструкция по эксплуатации

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Date Prepared: May 19, 2015
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1. As evaluations on hazards are not necessary satisfactory, special attention should be paid for use.
2. This SDS, summarizing matters to be attended to, is required for proper use of the product and is intended for
normal use.
3. Referring to this SDS, properly use and handle this product on the user’s own responsibility.
4. The contents of this SDS are based on information available as of today and our knowledge. The information,
data, and evaluations herein are not guaranteed, and in addition, may be revised due to revision of laws or
knowledge newly obtained.