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46

HA0378T Rev C Feb 2019

Chapter 5

.

Fig. 5.5   Loop settings v Load

Deriv. LP Cut Off

- The output of the derivative (differential) part of the PID controller

can be passed through a tuneable low pass filter. Whilst the derivative component of

the PID loop often improves stability (as it acts as a retaining force against abrupt

changes in the system), it is prone to amplifying noise present in the system, as the

derivative component is sensitive to changes between adjacent samples. To reduce

this effect, a low pass filter can be applied to the samples. As noise often tends to

contain  predominantly  high  frequency  components,  the  low  pass  filter  can

significantly  decrease  their  contribution,  often  without  diminishing  the  beneficial,

stabilizing effect of the derivative action. In some applications enabling this filter can

improve the overall closed loop performance.
The 

Cut Off Frequency 

is specified in Hz in the range 0 to 10000. (default 1000)

Notch  Filter  Settings  - 

Due  to  their  construction,  most  actuators  are  prone  to

mechanical resonance at well-defined frequencies. The underlying reason is that all

spring-mass systems are natural harmonic oscillators. This proneness to resonance

can  be a  problem in closed loop systems  because,  coupled with the effect of  the

Содержание LPS710/M

Страница 1: ...LPS710E Long Travel Piezo Stage and Controller APT User Guide Original Instructions ...

Страница 2: ...ories 13 3 2 1 LPSA1 Slide Adapter 13 3 2 2 LPSA4 Raiser Plate 13 3 2 3 LPSA5 Mirror Mount for 7mm Mirrors 13 3 3 Mounting 14 3 3 1 General 14 3 4 Installing the Stage 14 3 5 Installing the Controller 15 3 5 1 Siting 15 3 5 2 Environmental Conditions 15 3 6 Installing APT Software 16 3 7 Electrical Connection 16 3 7 1 Connecting To The Supply 16 3 7 2 Connecting The Hardware 17 3 7 3 Powering Down...

Страница 3: ...e Output control 30 4 6 5 Jogging the Piezos 31 4 7 Using the Controller as a Piezo Amplifier 32 4 8 Thermal Shutdown 33 4 9 Using the MZF001 Joystick 34 4 10 Load Response 35 4 11 Creating a Simulated Configuration Using APT Config 36 Chapter 5 Software Reference 39 5 1 GUI Panel 39 5 2 Settings Panel 41 5 2 1 General tab 41 5 2 2 Loop Tuning tab 43 Appendices Appendix A Rear Panel Connector Pino...

Страница 4: ...ction provided by the equipment may be impaired In particular excessive moisture may impair operation Spillage of fluid such as sample solutions should be avoided If spillage does occur clean up immediately using absorbant tissue Do not allow spilled fluid to enter the internal mechanism The equipment is for indoor use only The equipment is not designed for use in an explosive atmosphere Caution I...

Страница 5: ...se sensors give correct positioning with submicron repeatability and resolution on the order of 2 nm in open loop and 6 nm in closed loop making this product ideal for applications that require highly accurate positioning control With 25V applied to the piezo stack the stage is at its maximum height Increasing the drive voltage reduces the height of the top platform The system also provides active...

Страница 6: ...nd ease of use adjustment of many key parameters is possible through direct interaction with the graphical panel For example the output drive voltage or position can be adjusted by rotating a software panel control knob see the tutorial in Chapter 4 for further details Note that all such settings and parameters are also accessible through the ActiveX programmable interfaces See Section 2 2 for a f...

Страница 7: ... server which provides all of the necessary APT system software services such as generation of GUI panels communications handling for multiple USB units and logging of all system activity to assist in hardware trouble shooting It is this APT server engine that is used by software developers to allow the creation of advanced automated positioning applications very rapidly and with great ease The AP...

Страница 8: ...d loaded to allow multiple operating configurations to be created and easily applied For many users the APTUser application provides all of the functionality necessary to operate the APT hardware without the need to develop any further custom software For those who do need to further customise and automate usage of the controller e g to implement a positioning algorithm this application illustrate...

Страница 9: ...efore running the APT software These settings have global effect such as switching between simulator and real operating mode and incorporation of calibration data The APTConfig utility is provided as a convenient means for making these system wide settings and adjustments Full details on using APTConfig are provided in the online help supplied with the utility Use of the APT Config utility is cove...

Страница 10: ...re component Consequently ActiveX Controls can be incorporated into a wide range of software development environments for use by client application developers Development environments supported include Visual Basic Labview Visual C C Builder HPVEE Matlab VB NET C NET and via VBA Microsoft Office applications such as Excel and Word Consider the ActiveX Control supplied for the PPC001 APT piezo cont...

Страница 11: ...he APTUser and APTConfig utilities take advantage of and are built on top of the powerful functionality provided by the APT ActiveX Server as shown in Fig 2 3 Fig 2 3 System Architecture Diagram Refer to the main APT Software online help file APTServer hlp available from the Windows Start menu for a complete programmers guide and reference material on using the APT ActiveX Controls collection Addi...

Страница 12: ...d by mishandling The unit should only be handled by its base not by any attachments to the moving part The equipment contains no user servicable parts Do not remove any screws securing the covers or attempt any repairs or adjustments as this will affect the calibration and invalidate the warranty LPSA4 Riser Plate LPSA5 Mirror Mount LPS710 Stage Sold Separately LPSA1 Slide Holder Sold Separately S...

Страница 13: ...eatures a recess in the center for absorbing materials 3 2 2 LPSA4 Raiser Plate The LPSA4 is a small breadboard type adapter plate that offers a range of options when mounting devices to the stage It features 12 tapped holes the metric plate has four M4 and eight M3 holes whereas the imperial plate has four 8 32 and eight 6 32 holes 3 2 3 LPSA5 Mirror Mount for 7mm Mirrors The LPSA5 is a mount for...

Страница 14: ... Cautions When mounting the stage within the application ensure that the travel is not obstructed The moving world moves down as the voltage is increased If the stage is driven against a solid object damage to the internal mechanism could occur The range of travel is 800 µm in closed loop but can be up to 1100 µm 10 in open loop When considering movement in the proximity of other objects or equipm...

Страница 15: ...ironment of high humidity it must be allowed to reach ambient conditions before being powered up Caution Ensure that proper airflow is maintained to the sides of the unit Warning Operation outside the following environmental limits may adversely affect operator safety Caution In applications requiring the highest level of accuracy and repeatability it is recommended that the stage and the controll...

Страница 16: ...rent hardware activity Caution Some PCs may have been configured to restrict the users ability to load software and on these systems the software may not install run If you are in any doubt about your rights to install run software please consult your system administrator before attempting to install If you experience any problems when installing software contact Thorlabs on 44 0 1353 654440 and a...

Страница 17: ...device must understand the hazards associated with using high voltages and the steps necessary to avoid risk of electrical shock The piezo controller must be switched OFF before the piezo stage is plugged in or unplugged Failure to switch the controller off may result in damage to either the controller the stage or both Caution The controller and piezo stage are calibrated at the factory and are s...

Страница 18: ...nce on basic operation Note The APT Config utility can be used to set up simulated hardware configurations and place the APT Server into simulator mode In this way it is possible to create any number and type of simulated virtual hardware units in order to emulate a set of real hardware This is a particularly useful feature designed as an aid to application program development and testing Any numb...

Страница 19: ...e spikes on power down In applications requiring the highest sensitivity the piezo drive voltage should be set to zero before the unit is powered down When power is applied do not disconnect the piezo stage from the unit Note Ensure that the mating faces of the connectors on the stage and the rear panel of the unit are properly aligned Misalignment can cause connection problems Tighten the securin...

Страница 20: ...are these user programmable logic lines can be deployed in applications requiring control of external devices such a relays light sources and other auxilliary equipment see Section A 2 for further details RS232 Provides connection for serial port communication see Section A 3 USB USB port for system communications Caution Before the input can be used the Drive Input Source must be set to a BNC SW ...

Страница 21: ...losed Loop mode If the LED is not lit the unit is operating in open loop Error LED Lit when one of the following fault conditions occur 1 One or more power supply voltages are out of range 2 Closed loop mode is selected but the associated piezo is disconnected 3 An overtemp condition has occurred see Section 4 8 Note The brightness of the front panel LEDs can be adjusted Full Dim or Off to match t...

Страница 22: ... linearized in the digital domain and for maximum accuracy the linearizing curve is individually matched to the sensor The setpoint position is maintained by a PID controller whose coefficients can be tuned to optimize system response The PID controller is followed by a dual notch filter that when enabled dampens the natural mechanical resonance exhibitied by the mass and elasticity of the stage F...

Страница 23: ...Notch Filter fc fc f f Tunable Low Pass Filter Notch Frequency and Bandwidth Notch Filter On Off Tunable Notch Filter fc f Derivative Cut Off Frequency position setpoint Proportional coefficient Subtract _ error e x Multiply Integral coefficient Multiply Differential coefficient Multiply Integrator Differentiator e x dt 0 now t d x dt Linearization To Fig 3 5 18 bit ADC 20 bit DAC From Fig 3 7 ...

Страница 24: ...ware configurations and parameter settings can be saved to a file which simplifies system set up whenever APTUser is run up This tutorial shows how the APTUser application provides all of the functionality necessary to operate the APT hardware 1 Install the hardware as detailed in Chapter 3 2 Switch ON the controller 3 Run the APT User program Start All Programs Thorlabs APT User APT User The APT ...

Страница 25: ...iezo actuators in this product use high voltages Voltages up to 150V may be present at the STAGE connector on the rear panel This is hazardous and can cause serious injury Appropriate care should be taken when using this device Persons using the device must understand the hazards associated with using high voltages and the steps necessary to avoid risk of electrical shock The piezo controller must...

Страница 26: ...age the piezo controller continuously monitors the position signal and if necessary adjusts the output voltage to maintain the required position 4 4 Tuning Note The PPC001 controller and LPS710 piezo actuated stage are a matched pair that have been calibrated together for maximum accuracy On power up the controller checks that it is connected to the LPS710 unit with which it was calibrated If ther...

Страница 27: ...ith 10 increments until position display indicates a large ringing effect in the range of microns Consider this point as threshold for stability 12 Reduce the threshold values by 10 to 20 to ensure a safe margin and a fast response is guaranteed 13 In case of a high level ringing e g amplitude in order of 10s of microns especially if it is audible switch to Open Loop mode set parameters as explain...

Страница 28: ...zo Position Closed Loop 1 Click the Closed Loop button on the GUI or on the front panel 2 Click the Position button 3 Click the main display to view the posiition pop up window Fig 4 2 Position Popup Window 4 Enter 200 into the pop up window 5 Click OK Notice that the position display counts up to 200 00 to indicate a move to a position 200µm from the Zero datum Note The piezo position can be ente...

Страница 29: ...ition attained by a corresponding specified distance can be rationalized This is particularly important when operating in open loop via the GUI Output control to find an area of interest and then switching to closed loop and exploring this area using an external voltage source To adjust the zero position 1 Ensure that any external signal External BNC input or joystick is set to 0V then in the GUI ...

Страница 30: ...sition display increments to show the increasing piezo position 4 Rotate the Output control anticlockwise Notice how the position display decrements to show the decreasing piezo position 5 Click the Voltage button Notice how the display changes to show the voltage associated with the current piezo position Note The read out in the main digital display is independent of the operating mode open or c...

Страница 31: ... 4 4 Piezo settings panel 2 Select the General tab as shown in above 3 In the Jog Step Size field enter 0 1 4 Click OK to save the settings and close the window 5 Click the right hand Jog arrow on the GUI panel to jog the piezo Notice that the display increments 0 1 µm or Volts every time the button is clicked 6 Click the left hand Jog arrow on the GUI panel Notice that the display decrements 0 1 ...

Страница 32: ...ollowing procedure explains how to configure the unit as a piezo amplifier 1 Connect a 10V external source to the EXT IN connector on the rear panel 2 In the GUI panel click the Settings button to display the settings panel Fig 4 5 Piezo settings panel 3 Select the General tab 4 In the Drive Input Source field select BNC SW Caution When using the controller as an amplifier the performance of the p...

Страница 33: ...0 minutes for the unit to cool down Caution When driving the piezo stage from an external source the external signal is added to the software input GUI panel or SetVoltOP software method and if connected and selected the Joystick In closed loop a drive voltage of 120V gives around 800 µm travel in open loop the drive voltage can be as high as 150 V with a travel of 1100 µm When using an external s...

Страница 34: ...1 Connect the stage to the controller 2 Using the lead supplied connect the CONTROLLER EXT IN terminal on the joystick console to the JOYSTICK connector on the rear panel of the Controller unit Fig 4 1 Connections 3 Switch ON the controller 4 Wait until the red warning LED on the joystick console stop flashing 3s This indicates that initialisation is complete 5 Run APTUser and set the Drive Input ...

Страница 35: ...10E Long Travel Piezo Stage and Controller 4 10 Load Response The response of the PPC001 to varying capacitance and frequencies is shown below Fig 4 6 Response of PPC001 to Varying Capacitance and Frequencies ...

Страница 36: ...d learning how to use the APT software and as an aid to developing custom software applications offline Any number of virtual control units can be combined to emulate a collection of physical hardware units For example an application program can be written then tested and debugged remotely before running with the hardware To create a simulated configuration proceed as follows 1 Run the APT Config ...

Страница 37: ...ontroller 4 In the Simulator field check the Enable Simulator Mode box The name of the most recently used configuration file is displayed in the Current Configuration window 5 In the Control Unit field select Precision Piezo Controller PPC001 ...

Страница 38: ...ardware unit is factory programmed with a unique 8 digit serial number In order to simulate a set of real hardware the Config utility allows an 8 digit serial number to be associated with each simulated unit It is good practice when creating simulated configurations for software development purposes to use the same serial numbers as any real hardware units that will be used Although serial numbers...

Страница 39: ...f the operating mode open or closed loop selected for the particular channel If the Volts button is selected then the read out is in volts even if the channel is in closed loop mode and the Output control is being used to adjust position Similarly if the position button is selected the read out is in microns derived from the feedback signal even if the channel is operating in open loop Jog used to...

Страница 40: ...n be set either via the Settings panel or by calling the SetJogStepSize method Input Source displays the input source associated with the selected channel The input source can be set either via the Settings panel or by calling the SetPPCIOSettings method see Section 5 2 1 Monitor the EXT OUT BNC connector on the rear panel can be used to monitor the piezo actuator on an external device e g oscillo...

Страница 41: ...the APT ActiveX controls 5 2 1 General tab Fig 5 2 Piezo Settings panel General tab Output Voltage Range used to set the maximum output voltage of the piezo controller The piezo actuator connected to the controller has a specific maximum operating voltage range and this parameter is used to set a corresponding value for the maximum output voltage Additionally in some applications it can be useful ...

Страница 42: ...al driving the EXT OUT Monitor BNC is a scaled down version of the piezo output voltage with 150 V piezo voltage corresponding to 10V If Unprocessed Position is selected the signal driving the EXT OUT Monitor BNC is the output voltage of the position demodulator This signal shows a slight nonlinearity as a function of position and a small offset voltage As a result it is not as accurate as the lin...

Страница 43: ...from the front panel of the unit may cause unwanted light polution This parameter allows the brightness of the front panel LED display to be adjusted either Full Dim or OFF Persist Settings to Hardware Many of the parameters that can be set for the PPC001 controller can be stored persisted within the unit itself such that when the unit is next powered up these settings are applied automatically Th...

Страница 44: ...igh proportional gain results in a large change in the output for a given error If set too high the system can become unstable It accepts values in the range 0 to 10000 default 0 Int The Integral parameter accelerates the process towards the demanded set point value ensuring that the positional error is eventually reduced to zero If set too high the output can overshoot the demand value It accepts...

Страница 45: ...al beyond an optimum value results in unnecessary overshoot The same settings with a large step size e g 200 µm could result in a much higher overshoot Therefore for steps larger than 50 µm the integral should be reduced for optimum performance As a guide to setting these parameters for different loads please see Fig 5 4 and Fig 5 5 Fig 5 4 Effect of integral value on overshoot ...

Страница 46: ...ed to the samples As noise often tends to contain predominantly high frequency components the low pass filter can significantly decrease their contribution often without diminishing the beneficial stabilizing effect of the derivative action In some applications enabling this filter can improve the overall closed loop performance The Cut Off Frequency is specified in Hz in the range 0 to 10000 defa...

Страница 47: ...nough or at a high enough frequency for the resonance not to be troublesome With other actuators the resonance peak is very significant and needs to be eliminated for operation in a stable closed loop system The notch filter is an adjustable electronic anti resonance that can be used to counteract the natural resonance of the mechanical system ...

Страница 48: ...uivalent quality factor often referred to as the Q factor can also be adjusted In simple terms the Q factor is the center frequency bandwidth and defines how wide the notch is a higher Q factor defining a narrower higher quality notch Optimizing the Q factor requires some experimentation but in general a value of 0 2 to 5 is in most cases a good starting point The Center Frequency is specified in ...

Страница 49: ...nused 9 Unused 3 Unused 10 Stage ID 4 Sinewave Excitation Output 11 Low Voltage Ground 5 Unused 12 Low Voltage Ground 6 15 V Preamplifier Supply 13 Piezo ID Legacy Stages 7 Low Voltage Ground 14 Position Sense Input Strain Gauge Coaxial Female High Voltage Output 15 15 V Preamplifier Supply Coaxial Male Position Sense Input Capacitive Notes Power supply for the piezo actuator feedback circuit It m...

Страница 50: ...igital I P 4 5 9 or 10 6 Digital I P 1 5 9 or 10 14 5V Supply Output 5 9 or 10 7 Digital I P 2 5 9 or 10 15 5V Supply Output 5 9 or 10 8 Digital I P 3 5 9 or 10 Warning Do not under any circumstances attempt to connect the digital I O to any external equipment that is not galvanically isolated from the mains or is connected to a voltage higher than the limits specified in Section A 2 2 to Section ...

Страница 51: ...digital outputs used here can be used to directly drive most optocouplers and the 5V supply available on pins 14 and 15 can be used to provide power for the optocouplers Fig A 4 Application Example Connection to Optocoupler Inputs The digital outputs can also be used to interface to external logic circuitry a pull up resistor may be needed if the external logic does not contain it or control other...

Страница 52: ...ead LOW if the voltage is above 2 4V and HIGH when the output is below 0 8 V Please see the APTServer helpfile for details on software calls used to control these logic IO A 2 4 Trigger Output The trigger output is different from the rest of the digital outputs in that it is a 5V CMOS logic gate with a series 1 kOhm resistor for protection It behaves as 5V voltage source with 1 kOhm in series when...

Страница 53: ...s Fig A 7 Trigger Input Schematic protection circuitry not shown When connected to a switch the inputs will read as logic LOW if the switch is open circuit and HIGH if the switch is closed When connected to a logic output or any other voltage source the input is guaranteed to read LOW if the voltage is above 2 4V and HIGH when the output is below 0 8 V A 2 6 5 Volt Supply A 5 V 250 mA supply is pr...

Страница 54: ... to a host PC The pin functions are detailed in in Fig A 8 Fig A 8 RS232 Connector Pin Identification A 4 Rear Panel Joystick Connector Provides connection to the MZF001 joystick The pin functions are detailed in Fig A 9 Fig A 9 HANDSET Connector Pin Identification Pin Description 1 Not Connected 2 RX controller input 3 TX controller output 4 Not Connected 5 Ground 6 Not Connected 7 Not Connected ...

Страница 55: ...lidate the warranty Shock Warning The equipment contains no user servicable parts There is a risk of electrical shock if the equipment is operated with the covers removed Only personnel authorized by Thorlabs Ltd and trained in the maintenance of this equipment should remove its covers or attempt any repairs or adjustments Maintenance is limited to safety testing and cleaning as described in the f...

Страница 56: ...Loop Resolution Theoretical 6 nm Stiffness 0 1 N µm 20 Pull Force Increasing Voltage 55 N 15 Push Force Decreasing Voltage 45 N 15 Resonant Frequency for 15 g Load Primary 185 Hz 15 Scondary 115 Hz 15 Max Load any direction a 300g 0 66 lb Accuracy over 800 µm closed loop 0 06 Bidirectional Repeatability over 800 µm closed loop 0 03 Angular Error over 800 µm closed loop 40 µrad Capacitance 16 0 µF ...

Страница 57: ...e Ended Input Impedance 10 k Input Voltage Range 10 V to 10 V DC Absolute Maximum Input Voltage 20 V DC Input Voltage for Full Range 10 V DC 2 External Output BNC Output Voltage Range 0 to 10 V nominal for full range in closed loop b Output Impedance 100 Minimum Recommended Load Impedance 10 k Protection Protected against short circuit Scaling Factor HV Monitor 1 15 10V for a piezo voltage of 150 ...

Страница 58: ...e with Thorlabs MZF001 Joystick Closed Loop Algorithm Digital PID with Dual Tuneable Notch Filter Processor DSP 32 bit Floating Point 160 MHz ARM Cortex M4F Servo Update Interval 50 µs EXT IN ADC Resolution 24 Bits Position ADC Resolution 18 Bits HV DAC Resolution 20 Bits Housing Dimensions incl feet excl connectors 147 mm x 205 mm x 68 3 mm 5 79 x 8 07 x 2 69 Weight 1 65 kg 3 63 lb ...

Страница 59: ...to the required format when the serial number has been entered The Methods and Properties of the Piezo ActiveX Control can be used to perform activities such as selecting output voltages reading the strain gauge position feedback operating open and closed loop modes and enabling force sensing mode A brief summary of the methods and propertys applicable to the PPC001 unit is given below for more de...

Страница 60: ...LGetDigIPs Gets digital input states encoded in 32 bit integer LLGetStatusBits Gets the controller status bits encoded in 32 bit integer LLGetHostStatusBits Gets the controller status bits encoded in 32 bit integer LLSaveHWDefaults Allows the current settings of the operation parameters to be saved into the onboard Flash memory of the hardware unit LLSetGetDigOPs Sets or Gets the user digital outp...

Страница 61: ...tVoltOutput Sets the HV output voltage SetVoltPosDispMode Sets the GUI display mode voltage or position ShowEventDialog Shows the event dialog when it has previously been disabled using the EnableEventDlg method StartCtrl Starts the ActiveX Control starts communication with controller StartOutputLUT Starts outputting the voltage waveform LUT StopCtrl Stops the ActiveX Control stops communication w...

Страница 62: ...lly hundreds of newtons Perhaps the most useful property of these actuators is their ability to produce oscillating motion at considerable frequencies usually limited by the mechanical system driven rather than by the piezo actuator itself This ability is used to advantage in the NanoTrak control system for example The electric field gradient needed to produce a useful amount of expansion is quite...

Страница 63: ...ensor measures the position the circuit subtracts the measured position from the demand position to get the error and a proportional integral feedback loop adjusts the voltage to the actuator until the error is virtually zero Some Thorlabs nanopositioning actuators have position sensing others do not The Piezoelectric control module allows both types to be controlled To control an actuator with po...

Страница 64: ... control is a linear relationship between demand voltage and measured position see Fig E 4 in contrast to open loop control see Fig E 2 Fig E 4 Closed loop response amp actuator demand moving part open loop control amp actuator sensor a b s demand moving part closed loop control _ real position demand position ...

Страница 65: ...cause harmful interference in which case the user will be required to correct the interference at his own expense Changes or modifications not expressly approved by the company could void the user s authority to operate the equipment F 2 Waste Electrical and Electronic Equipment WEEE Directive F 2 1 Compliance As required by the Waste Electrical and Electronic Equipment WEEE Directive of the Europ...

Страница 66: ...orlabs or your nearest dealer for further information F 2 2 Waste treatment on your own responsibility If you do not return an end of life unit to the company you must hand it to a company specialized in waste recovery Do not dispose of the unit in a litter bin or at a public waste disposal site F 2 3 Ecological background It is well known that WEEE pollutes the environment by releasing toxic prod...

Страница 67: ...67 LPS710E Long Travel Piezo Stage and Controller F 3 CE Certificate ...

Страница 68: ...Appendix F 68 HA0378T Rev C Feb 2019 ...

Страница 69: ...andinavia Thorlabs Sweden AB Bergfotsgatan 7 431 35 Mölndal Sweden Tel 46 31 733 30 00 Fax 46 31 703 40 45 www thorlabs com Email scandinavia thorlabs com France Thorlabs SAS 109 rue des Côtes 78600 Maisons Laffitte France Tel 33 0 970 444 844 Fax 33 0 825 744 800 www thorlabs com Email sales fr thorlabs com Brazil Thorlabs Vendas de Fotônicos Ltda Rua Riachuelo 171 São Carlos SP 13560 110 Brazil ...

Страница 70: ... Ltd Saint Thomas Place Ely Cambridgeshire CB7 4EX UK Tel 44 0 1353 654440 Fax 44 0 1353 654444 www thorlabs com Thorlabs Inc 56 Sparta Ave Newton NJ07860 USA Tel 1 973 300 3000 Fax 1 973 300 3600 www thorlabs com ...

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