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5.9 Acquisition of motion waveform with graph monitor

With the setup software (MR Configurator2

TM

: LEC-MRC2E) monitor graph function, the motion waveform during

electric actuator operation can be obtained as described below.

①

Click “Monitor” - “Graph” of Setup software to display “Graph” window.

①

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Содержание LEFB25

Страница 1: ...PRODUCT NAME AC Servo Motor Driver Pulse input type MODEL Series Product Number LECSB Series Simplified edition LEC OM05806 Doc no JXC OMT0054 A ...

Страница 2: ...文書管理 No 旧文書体系 No 対応表文書管理 No 旧文書体系 No JXC OMT0054 LEC OM05805 JXC OMT0054 A LEC OM05806 本書は対応文書の原紙と一緒に保管する ...

Страница 3: ... 17 5 2 1 Start up the Setup software MR Configurator2TM 18 5 2 2 System Settings 19 5 2 3 Model Selection 19 5 2 4 Driver ON LINE Check 20 5 2 5 Help Function 20 5 3 Parameter setting Driver side 21 5 3 1 Change of parameter block 22 5 3 2 Read of parameters 22 5 3 3 Parameter setting method 23 5 3 4 The recommended parameters for each actuator 24 5 3 5 Absolute position detection system 28 5 3 6...

Страница 4: ... Acquisition of motion waveform with graph monitor 53 5 9 1 Under the setting Tab Setting of the items to display the graph 54 5 9 2 Trigger wait 58 5 9 3 Operation Instruction 59 5 9 4 Saving of waveform 60 5 10 Display All Monitor List 61 6 Home position return method 63 6 1 Position control pulse input mode 63 7 Operating method of each mode 63 7 1 Position control mode 63 7 1 1 Operation instr...

Страница 5: ...ance and safety assurance of the equipment will be the responsibility of the person who has determined its compatibility with the product This person should also continuously review all specifications of the product referring to its latest catalog information with a view to giving due consideration to any possibility of equipment failure when configuring the equipment 2 Only personnel with appropr...

Страница 6: ...cuit which requires the provision of double interlock for possible failure by using a mechanical protective function and periodical checks to confirm proper operation Note that the CAUTION level may lead to a serious consequence according to conditions Please follow the instructions of both levels because they are important to personnel safety ...

Страница 7: ...stance or replacement parts Please consult your nearest sales branch For any failure or damage reported within the warranty period which is clearly our responsibility a replacement product or necessary parts will be provided This limited warranty applies only to our product independently and not to any other damage incurred due to the failure of the product Prior to using SMC products please read ...

Страница 8: ... 3 1 of the LECSB Operation Manual and chapter 3 of the LECSB Operation Manual Simplified Edition for details Please put the wiring for EMG Emergency stop into the state of EMG release operational However EMG Emergency stop cannot be compulsorily set to automatic ON by the parameter When setup software MR Configurator2TM is used the LECSB model selection is required Select MR J3 A through Model Ne...

Страница 9: ...r2TM LEC MRC2 7 Main circuit power supply connector CNP1 Accessory 8 Control circuit power supply connector CNP2 Accessory 9 Motor connector CNP3 Accessory 10 Battery LEC MR J3BAT a bundled item It is unnecessary when using it with the incremental system Note The lock cable option is not shown on this drawing Refer to the LECSB Operation Manual for details Ex 200 V AC 1 3 2 Electric Actuators Ex L...

Страница 10: ...nal set speed with I O signal Signal assignment setting See 5 5 Changing I O Signal Allocation Setting of Speed control mode See 7 2 Speed control mode Setting of Torque control mode See 7 3 Torque control mode Parameter Settings using the Setup Software MR Configurator2TM See 5 Parameter Settings using the Setup Software MR Configurator2TM Setting of Position control mode See 7 1 Position control...

Страница 11: ...OCOM CN1 CN1 24VDC Trouble Note 4 MC NFB RA Servo motor Servo amplifier Emergency stop Note 6 Servo on RA Emergency stop OFF MC ON MC SK Note 6 Note 7 1 Provide specified power supply to input terminals L1 and L2 2 Connect the motor power supply input terminal U V W to the driver power terminal U V W Connect the motor ground terminal to the driver ground terminal Connect the cable for detector 3 C...

Страница 12: ...11 Note 7 CN1 QD75D Positioning module 24VDC In position Note 4 12 Control common SD RA1 RA2 RA3 RA4 Plate Note 1 2m max 10m max Upper limit setting 42 15 19 17 18 43 44 47 1 27 SD EMG SON RES PC TL LSP LSN DOCOM P15R TLA LG 28 Note 7 CN1 Emergency stop Servo on Reset Proportion control External torque limit selection Forward rotation stroke end Reverse rotation stroke end Note 3 5 Note 5 Note 10 ...

Страница 13: ...is enabled LSN Reverse rotation stroke end Turn this signal on before operation When this signal turns off the product is stopped suddenly and servo lock is enabled TL External torque limit selection Analog torque limit TLA is enabled when it is turned ON TL1 Internal torque limit selection When this signal turns on the torque will be lower than the set parameter torque ST1 Forward rotation start ...

Страница 14: ...external dynamic brake This can be used by setting parameters RD Ready When servo on turns on and operation is available this signal turns on INP In position This signal turns on when the accumulated pulse is within the setting range SA Speed reached When the servo motor rotation speed reaches the set speed this signal turns on VLC Limiting speed This signal turns on when reaching the speed restri...

Страница 15: ... rotation start Encoder A phase pulse differential line driver Encoder B phase pulse differential line driver Control common Encoder Z phase pulse open collector Encoder Z phase pulse differential line driver Note 12 Trouble Note 6 Zero speed detection Limiting torque Ready Speed reached Servo amplifier Note 1 Note 2 21 DICOM 48 ALM 23 ZSP 25 TLC 24 SA Note 7 CN1 49 RD 4 LA 5 LAR 6 LB 7 LBR 34 LG ...

Страница 16: ... Servo on Reset Speed selection 1 Speed selection 2 Note 3 Analog torque command 8V max torque Note 10 Upper limit setting Analog speed limit 0 to 10V rated speed Note 9 Forward rotation selection Reverse rotation selection 24VDC Note 4 Servo amplifier Note 1 9 Note 2 21 DICOM 48 ALM 23 ZSP 25 VLC 4 LA 5 LAR 6 LB 7 LBR 34 LG 33 OP 1 P15R SD 10m max 2m max Note 6 CN1 49 RD 8 LZ LZR Note 6 CN1 20 46...

Страница 17: ...e If the voltage drop maximum of 2 6V interferes with the relay operation apply high voltage up to 26 4V from external source 4 Parameter list for each mode Parameters require setting If necessary please set the parameters Refer to LECSB Operation Manual chapter 5 and LECSB Operation Manual Simplified Edition section 5 3 for details Refer to LECSB Operation Manual chapter 5 for parameters which ar...

Страница 18: ... denominator Command pulse multiplying factor denominator 1 PA08 ATU Auto tuning mode 0001h PA09 RSP Auto tuning response 12 PA10 INP In position range 100 pulse PA13 PLSS Command pulse input form 0000h PA14 POL Rotation direction selection 0 4 3 Speed control mode 1 Basic setting parameters No PA No Symbol Name Initial value Unit PA08 ATU Auto tuning mode 0001h PA09 RSP Auto tuning response 12 2 ...

Страница 19: ...software MR Configurator2TM 1 Setup software version 1 19V or above is required 2 The setup software MR Configurator2TM LEC MRC2E must be purchased as an additional item 3 The USB cable LEC MR J3USB must be purchased as an additional item 5 1 1 Installation Method Perform installation according to the MR Configurator2TM instruction manual Manual ib0300160 pdf contained on the setup software MR Con...

Страница 20: ...t up the Setup software MR Configurator2TM Connect the PC and LECSB using the USB cable Turn on the power of the LECSB Start application MR Configurator2 Once the application starts the screen below will be displayed ...

Страница 21: ...ion list Please select MR J3 A if using the LECSB The station should be set to 00 The setting should match the setting of parameter PC20 The default value of parameter PC20 is 0 When using LECSB for the first time please use the default value for parameter PC20 which is set to 0 and please set Station to 00 Please select servo amplifier connection USB as the communication device Click OK Click OK ...

Страница 22: ...owing points Is amplifier s power supply turned on Is PC and amplifier LECSB connected with the USB cable Is the USB driver installed Is the USB driver which is compliant to correct Windows version installed Is the setting of Port for USB connection correct 5 2 5 Help Function By selecting MR Configurator2 Help when Help is initiated from any window of the MR Configurator2TM setup software a HELP ...

Страница 23: ...cable LEC MR J3USB must be purchased as an additional item From the Parameter menu select Parameter Setting the parameter setting window will open The explanation of the parameter item is displayed in MR2 Help When it is not displayed from the View menu select Docking window Docking Help When each item of List display is clicked Parameter list screen along each item is displayed When Basic is sele...

Страница 24: ...the power it does not register the data in the driver Note2 Selected Items Write It writes the specific parameter values of the corresponding frame to the driver Single Axis Write It writes all of the parameters to the driver Note3 Do not change For manufacturer setting parameters If you change by these by mistake it may cause the amplifier to not work properly 5 3 2 Read of parameters If you read...

Страница 25: ... of each parameter Refer to LECSB Operation Manual Simplified Edition section 5 3 4 for details of parameters recommended value of each actuator Setting example of the Control mode PA01 in the case of setting to position control mode Set the parameters of the PA01 to 0000 in the Basic tab Click on the Single Axis Write button Turn the power OFFand ON again The Parameter is then enabled ...

Страница 26: ...ction selection 4 PA14 0 1 Counter motors side Adaptive tuning mode PB01 0000 0000 Load to motor inertia moment ratio PB06 7 7 Machine resonance suppression filter 1 PB13 4500 4500 Notch shape selection 1 PB14 0000 0000 Different from the initial value 1 Parameter is the recommended value Please change the parameter to make appropriate value for your operating method 2 A mechanical resonance may o...

Страница 27: ...de Adaptive tuning mode PB01 0000 0002 0000 Load to motor inertia moment ratio PB06 7 50 Machine resonance suppression filter 1 PB13 4500 400 4500 Notch shape selection 1 PB14 0000 0030 0000 Parameter should be changed Different from the initial value 1 Parameter is the recommended value Please change the parameter to make appropriate value for your operating method 2 A mechanical resonance may oc...

Страница 28: ...ide Adaptive tuning mode PB01 0000 0000 0002 0000 Load to motor inertia moment ratio PB06 7 7 50 Machine resonance suppression filter 1 PB13 4500 4500 400 4500 Notch shape selection 1 PB14 0000 0000 0030 0000 Parameter should be changed Different from the initial value 1 Parameter is the recommended value Please change the parameter to make appropriate value for your operating method 2 A mechanica...

Страница 29: ... Number of command input pulses per revolution 3 PA05 0 0 Electronic gear numerator 3 PA06 1 32768 65536 114688 32768 65536 Electronic gear denominator 3 PA07 1 250 125 125 125 250 125 125 Regenerative option PA02 0000 0000 Non 0002 LEC MR RB 032 0003 LEC MR RB 12 Rotation direction selection 4 PA14 0 0 Counter motors side 1 Counter motors side Adaptive tuning mode PB01 0000 0000 Load to motor ine...

Страница 30: ...to the text POINT Cycle the power off and then on again after setting the parameter to validate the parameter value Set this parameter when using the absolute position detection system in the position control mode Selection of absolute position detection system Refer to chapter 14 0 Used in incremental system 1 Used in absolute position detection system ABS transfer by DI0 2 Used in absolute posit...

Страница 31: ...tor numerator 1 1 to 1048576 PA07 CDV Electronic gear denominator command pulse multiplying factor denominator 1 1 to 1048576 Set the value PA05 to PA07 are as follows PA07 PA06 1 例リード 6 のアクチュエータで 1 パルスあたりのアクチュエータの移動量 P が 10 μm の場合 Ex Travel amount per 1 command pulse P 10μm Actuator lead L 6mm Pulley ratio n1 n2 1 1 PA05 0 Initial value 1 For pulley ratio refer to Lead of LECSB Operation Manual ...

Страница 32: ...he Basic tab of the Parameter Setting screen Control mode selection Please select Position control mode PA01 parameter in the Basic tab of the List display also changes to 0000 Click on the Single Axis Write button Click OK Click OK After power OFF ON the parameter is enabled ...

Страница 33: ...e train B phase pulse train Logic 2 types Positive logic Negative logic Input form 3 pulse types positive negative logic 2 types 6 selectable types In the upper level device positioning module there is a parameter which sets the output pulse form mode The form of the upper level device positioning module must be made compatable with the LECSA If the forms are not compatable the operation will not ...

Страница 34: ...fter they have been multiplied by 4 Selection of command pulse input form Setting Pulse train form Forward rotation command Reverse rotation command 0010h Negative logic Forward rotation pulse train Reverse rotation pulse train NP PP 0011h Signed pulse train PP L H NP 0012h A phase pulse train B phase pulse train PP NP 0000h Positive logic Forward rotation pulse train Reverse rotation pulse train ...

Страница 35: ...d parameter perform Verify Click the Verify button on the Parameter Setting window Verfication Setting screen will display Please select the comparison target Amplifier Compare with the parameters set in the driver Default Compare with the initial value of the parameter File Compare with saved parameters Please click OK button The verified result is displayed ...

Страница 36: ...eter storage method Click the Set To Default button on the Parameter Setting window Please click Yes button Parameter Block screen will display Set the default using an editable parameter as the browsable range of the selected parameter block Select the parameter block you want to initialize Please click OK button Set the default using an editable parameter as the browsable range of the selected p...

Страница 37: ...isplayed by selecting Jog Mode from the Test Mode menu in the setup software Click OK When using this function all external input signal operation will be diabled If controlling using a PLC or other upper device please turn off the power and reset the device before use ...

Страница 38: ...performing JOG operation in the setup software the rotation direction of the actuator does not change if you change the setting of parameter PA14 Rotation direction selection The actuator moves in the direction of Forward CCW button and Reverse CW button If the selection LSP and LSN are automatically turned ON is not checked an alarm will occur If checked the stroke end signals LSP LSN will be aut...

Страница 39: ... wire the I O signal layout If I O signal wiring layout is altered do not configure PD01 Input signal automatic ON selection Ex If the servo on SON is automatically turned on with PD01 the actuator will always be in the servo on state when the control circuit power supply is turned on Therefore it is not possible to operate servo on servo off from the I O signal Please configure PD01 Input signal ...

Страница 40: ...lly turned ON PD01 0C04 If you want to the SON to automatic ON Binary number BIN 0100 to Hexadecimal HEX 4 If you want to the LSP and LSN to automatic ON Binary number BIN 1100 to Hexadecimal HEX C Binary number BIN 0000 to Hexadecimal HEX 0 ...

Страница 41: ...N Signals Set to PD01 to 0C04 in the I O tab Select Single Axis Write Cycle the power for the altered parameters to be enabled In this configuration the stroke end LSP LSN and servo on SON signals will be ON automatically when the power is turned ON ...

Страница 42: ...ls See LECSB Operation Manual section 5 4 for parameter configuration values 5 5 3 Signal Allocation using Setup Software The Parameter Setting window will be displayed when Parameter Setting is selected from the Parameter menu in the setup software Click the I O tab When changing the allocation of signals parameters for PD03 PD08 PD10 PD16 or PD18 can be altered PD03 to PD12 Input signal assignme...

Страница 43: ... 41 5 5 4 Allocation example Position control mode 1 Example of Gain changing selection CDP Settings Changing pins CN1 16 to Gain changing selection CDP Changing PD04 from 00212100 to 0021210D 0 D ...

Страница 44: ...tab Select Single Axis Write Cycle the power the parametersto be enabled Please allocate pins CN1 16 separately See LECSB Operation Manual section 5 4 2 for details on allocation of Input signals to pins CN1 15 CN1 19 CN1 41 CN1 43 CN1 45 See LECSB Operation Manual section 5 4 2 for details on allocation of Output signals to pins CN1 22 CN1 25 CN1 49 ...

Страница 45: ...and signal names allocated to CN1 can be checked When parameters for PD03 PD08 PD10 PD16 or PD18 have been changed it is necessary to confirm these are correctly assigned From the Monitor menu of the Setup Software select I O Monitor The I O Monitor window opens Ex Position mode ...

Страница 46: ...window opens Check Command pulse unit Electronic gear valid and click OK Electronic gear ratio that is set in the PA05 PA06 PA07 is enabled Click OK When using this function external input signal operation will be disabled When controlling from a PLC or upper level device the power must be turned off and then on The Positioning Mode window opens ...

Страница 47: ...moves in the direction of Forward CCW button and Reverse CW button Check the command impulse unit electronic gear enabled The electronic gear duty set to PA05 PA06 PA07 will be enabled See LECSB Operation Manual Simplified Edition section 5 3 4 Parameter Values by Actuator Model for PA05 PA06 PA07 settings for each actuator If PA05 PA06 PA07 are set to the values in LECSB Operation Manual Simplifi...

Страница 48: ...erate if this is set to 0 If the rotation speed is too low this may cause vibration check the actuator while changing settings Movement speed mm s must be converted into rotation speed r min See below for the conversion formula Calculating motor speed conversion example using an actuator with a 20mm lead and 500 mm sec speed Rotation Speed rpm Speed mm s Lead mm 60 S 500 mm s 20 mm 60 s 1500 rpm D...

Страница 49: ...speed for each actuator The acceleration deceleration time must be converted from the acceleration deceleration speed See below for the conversion formula Calculating Acceleration deceleration conversion example using an actuator with a 8 mm lead with an acceleration of 3000 mm sec2 Acceleration deceleration time ms 3000 r min 60 S 8 mm 1000 3000 mm s2 133 ms Accel decel time ms Rated Rotation Spe...

Страница 50: ... 3 4 for setting values for PA05 PA06 PA07 in each actuator If parameters PA05 PA06 PA07 are set according to LECSB Operation Manual Simplified Edition section 5 3 4 the travel distance of the actuator per 1 pulse will be as follows travel distance of the actuator per 1 pulse 10 μm 0 01 mm Travel distance mm must be converted to travel distance pulse See below for the conversion formula As an exam...

Страница 51: ...re select Save As Please specify location to be saved Please enter any file name Click Save Files Saved prm2 Settings files for parameters PA PB PC and PD Note Always upload current parameters from the driver to the software before saving See LECSB Operation Manual Simplified Edition section 5 3 2 for uploading ...

Страница 52: ...d saved Parameters From the Parameter Setting window in the setup software select Open Please specify location of the file Please select the file you wish to import parameters prm2 Click Open Parameters will be loaded ...

Страница 53: ...ase enter any project name Click Save Project will be saved in the specified folder If you change the drive path name it will be saved in the drive path name project name folder you have changed Note Always upload current parameters from the driver to the software before saving See LECSB Operation Manual Simplified Edition section 5 3 2 for uploading ...

Страница 54: ... 2 To Load saved Parameters From the Project menu in the setup software select Open Please select the drive path name project name that you want to read parameters are stored Click Open Project will be loaded ...

Страница 55: ...h graph monitor With the setup software MR Configurator2TM LEC MRC2E monitor graph function the motion waveform during electric actuator operation can be obtained as described below Click Monitor Graph of Setup software to display Graph window ...

Страница 56: ...ger conditions and horizontal axis of the graph 3 types analogue waveform analogue 1 to 3 and 4 types of digital waveform digital 1 to 4 can be set 1 Time Set the horizontal axis time axis of the graph For LECSB set ms div and Number of collection Div to the horizontal axis time axis ms div Number of collection Div will be Measurement time Click of ms div and set the DiV number The unit ms of Numb...

Страница 57: ...n are displayed Click of Level Condition to set the condition For Motor speed when the operation direction is positive Level should be100 and when the operation direction is negative Level should be 100 Align the setting of Condition to the operation direction too Level Condition setting For Motor speed Operating direction Level r min Condition Positive direction operation 100 Startup Negative dir...

Страница 58: ...e The droop pulse on the deviation counter is displayed in units of 1 pulse Note Any area beyond the display range 32768 pulses to 32767 pulses is clamped and displayed in red 1pulse 8 Speed command The speed command to be given to the servo motor is displayed 1r min 9 Bus voltage The bus voltage of the driver amplifier is displayed 1V 10 Effective load ratio The continuous effective load torque i...

Страница 59: ...e separate axis setting 1ms 19 Overshoot amount The overshoot amount for position control is displayed in encoder pulses The method for measuring the overshoot amount can be selected from the separate axis setting 1pulse 20 Motor speed by 0 1 r min The servo motor speed is displayed 0 1r min Note 1 21 Command pulse frequency 0 1r min by speed The command pulse frequency is converted into the servo...

Страница 60: ... waveforms can be captured and displayed Click the Start button every time measurement fresh capture is required The advantage of this method of capturing the waveform is a waveform will not be updated in the case of an incorrect operation Click the Start button Trigger wait is displayed The acquisition of waveform will be canceled with Stop button ...

Страница 61: ...ger conditions in 5 9 1 2 are satisfied the operation waveforms can be captured When the time set in 5 9 1 1 has passed after the acquisition start the acquisition of the waveforms will complete and waveforms are displayed on the screen When the Scale Optimization button is clicked the vertical axis range is adjusted automatically ...

Страница 62: ...ved and save the data Waveform data file extension gpf2 will be prepared If the waveform condition needs to be checked it can be displayed on the graph window Click the Save Image button Select the folder in which the step data is to be saved and save the data An Image file extension jpg will be prepared Click the Screen Copy button Save the displayed waveform screen print screen ...

Страница 63: ...umulative feedback pulses Feedback pulses from the servo motor encoder are counted and displayed When exceeding 999999999 it returns to zero Press the Clear button to reset the display value to 0 zero Reverse rotation is indicated by a minus sign 999999999 to 999999999 pulse 2 Servo motor speed The servo motor speed is displayed The value rounded off is displayed in 0 1r min 7200 to 7200 r min 3 D...

Страница 64: ...yed in As the permissible regenerative power depends on whether there is the regenerative brake option or not Set Parameter PA02 correctly according to the regenerative brake option The guideline is 80 or less 0 100 9 Effective load ratio The continuous effective load current is displayed The effective value is displayed relative to the rated current of 100 0 300 10 Peak load ratio The maximum tor...

Страница 65: ...an input to the driver from the positioning unit The driver operates the actuator in accordance with the command pulse The command pulse and driver operation examples are shown below After changing gain Before changing gain Change of each gain CDT 100ms 63 4 Droop pulses pulses 0 Command pulse Droop pulses CDL CDL 95ms 95ms Electromagnetic brake interlock MBR Note 1 ON OFF ON OFF 0 r min Base circ...

Страница 66: ... No PC12 Forward rotation CCW Reverse rotation CW 10 Rated speed r min CCW direction 0 10 VC applied voltage V CW direction Rated speed Speed r min The following table indicates the rotation direction according to forward rotation start ST1 and reverse rotation start ST2 combination Note 1 Input device Note 2 Rotation direction ST2 ST1 Analog speed command VC Internal speed commands Polarity 0V Po...

Страница 67: ...mand 3 parameter No PC07 1 0 0 Internal speed command 4 parameter No PC08 1 0 1 Internal speed command 5 parameter No PC09 1 1 0 Internal speed command 6 parameter No PC10 1 1 1 Internal speed command 7 parameter No PC11 Note 0 off 1 on For LECSB analog speed command and speed from 7 patters can be set Signals assigned at the initial setting are SP1 and SP2 Assign signals of speed selection 3 SP3 ...

Страница 68: ...peed r min The following table indicates the torque generation directions determined by the forward rotation selection RS1 and reverse rotation selection RS2 when the analog torque command TC is used Note Input device Rotation direction RS2 RS1 Torque control command TC Polarity 0V Polarity 0 0 Torque is not generated Torque is not generated Torque is not generated 0 1 CCW reverse rotation in driv...

Страница 69: ... error 1 RAM warning AL 13 0 0 0 Clock error AL E1 Overload warning 1 AL 15 0 0 0 Memory error 2 EEP ROM AL E3 Absolute position counter AL 16 1 1 0 Encoder error 1 warning At power on AL E5 ABS time out warning AL 17 0 0 0 Board error AL E6 Servo emergency stop AL 19 0 0 0 Memory error 3 warning Flash ROM AL E8 Cooling fan speed AL 1A 1 1 0 Motor combination error reduction warning AL 20 1 1 0 En...

Страница 70: ...dition history is listed for alarms that occurred in the past Click Diagnosis Alarm Display of the setup software to display Alarm Display window Alarms warnings currently occurring in the driver display the contents If no alarm warning has occurred it will not be displayed Lists the history Maximum 6 cases of alarms that occurred in the past Warnings are not displayed ...

Страница 71: ...o LEC OM05805 No JXC OMT0054 Sep 2016 5th printing No LEC OM05806 No JXC OMT0054 A Jun 2017 6th printing 4 14 1 Sotokanda Chiyoda ku Tokyo 101 0021 JAPAN Tel 81 3 5207 8249 Fax 81 3 5298 5362 URL http www smcworld com Note Specifications are subject to change without prior notice and any obligation on the part of the manufacturer 2017 SMC Corporation All Rights Reserved ...

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