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7 Operation
7-4
7.1.4 Leak Valve Operation (After vacuum pump is stopped)
NOTE
When stopping the vacuum pump, release the molecular sieve case to
atmospheereic pressure.
(1) After stopping the vacuum pump, open the leak valve.
(Viewed from above, turn the valve counter-clockwise 2 complete turns.)
(2) After the air-leak sound disappears, close the leak valve.
Leak Valve
Fig. 7-1 Molecular Sieve Case
NOTE
Do NOT turn OFF the power switch before exiting the software. Otherwise, an error
will occur.
NOTE
If the cooling water circulation system is not going to be used for a long time,
remove the water from the tank.
Also, replace the water in the tank at least once a month.
Содержание ICPE-9000
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